Charged Particle Camera Mask Events for Defective Pixel Regions

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Solution Overview

Problem

Conventional microscopy systems face challenges in handling defective pixels in charged particle cameras, as existing interpolation methods require image transformation and cannot be applied to raw charged particle position data, leading to suboptimal reconstruction and potential errors in shift detection and multi-image alignment.

Innovation Solution

The implementation of a charged particle microscope support module that identifies defective pixel regions and generates 'mask' event indicators, allowing for defect masking within the camera hardware, enabling defect-free data processing and improved reconstruction by separating defect information for downstream software.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If image interpolation is performed using neighboring pixel values, then defective pixel regions can be masked, but the method requires image transformation and cannot be applied to raw charged particle position data

Engineering Contradiction:
Improvedefect masking capabilityVSAvoidprocessing complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by identifying defective pixel regions and creating mask event indicators before the main image reconstruction process. The support module pre-processes the raw charged particle position data to flag defective pixels, allowing downstream software to handle defect masking without requiring complex image transformation steps. This separates the defect identification step from the reconstruction step, enabling defect masking to be applied directly to raw position data.

Inventive Principle:
Principle #10Preliminary action

2Loss of information

If conventional interpolation methods are used, then defect information can be provided to software, but reconstruction quality deteriorates due to errors in shift detection and multi-image alignment

Engineering Contradiction:
Improvedefect information transmissionVSAvoidreconstruction accuracy
Core Design Contradiction:
Loss of informationVSMeasurement precision

Solution Approach 1:

The patent introduces an intermediary component - the charged particle camera support module - that acts as a mediator between the raw data acquisition and the reconstruction software. This support module generates specialized mask event indicators that encode defect information in a format suitable for downstream processing. By creating this intermediary layer, the system can provide defect information to software without compromising reconstruction accuracy, as the mask indicators are integrated into the event representation data in a way that preserves spatial and temporal information needed for precise alignment and shift detection.

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentUS11742175B2Defective pixel management in charged particle microscopy
Publication Date: 2023.08.29 FEI CO
  • US11742175B2 patent drawing
  • US11742175B2 patent drawing
  • US11742175B2 patent drawing

AI summary

Disclosed herein are methods, apparatuses, systems, and computer-readable media related to defective pixel management in charged particle microscopy. For example, in some embodiments, a charged particle microscope support apparatus may include: first logic to identify a defective pixel region of a charged particle camera, wherein the charged particle camera cannot detect charged particle events in the defective pixel region; second logic to generate a first charged particle event indicator that identifies a first time and a first location of a first charged particle event outside the defective pixel region, wherein the first charged particle event is detected by the charged particle camera; third logic to generate a second charged particle event indicator that identifies a second time and a second location in the defective pixel region; and fourth logic to output data representative of the charged particle event indicators.