Cantilever Probe Guide Portion Distortion Detection
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Solution Overview
Problem
Existing probes with cantilever structures cannot detect distortion when mounted on a probe substrate, leading to inaccurate contact with electrode pads during inspection, which results in decreased contact strength and increased electrical resistance.
Innovation Solution
A probe design that includes a tip portion, an arm portion with a cantilever structure, a support portion, and a guide portion, where the guide portion is connected to the arm portion and protrudes in the tip direction, allowing for detection of distortion by measuring the relative positional relationship between the contact portion and the guide portion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a probe with a cantilever structure is mounted on a probe substrate, then the probe can be used for inspection, but distortion of the probe cannot be detected, leading to inaccurate contact with the object to be inspected
Solution Approach 1:
The guide portion protrudes in the tip direction from the installation area of the arm portion, enabling preliminary detection of probe distortion before mounting on the probe substrate. This preliminary action allows the positional relationship between the contact portion and guide portion to be measured in advance, preventing undetected distortion during inspection
Solution Approach 2:
The guide portion acts as an intermediary element that enables indirect measurement of probe distortion. By measuring the positional relationship between the contact portion and guide portion, the distortion of the arm portion can be detected without directly measuring the arm portion itself, thus resolving the contradiction between maintaining cantilever structure and enabling distortion detection
2Reliability
If the tip portion of the probe is brought into contact with the object to be inspected while deviating from the center of the electrode pad, then contact strength decreases and electrical resistance increases, but distortion detection is not possible with conventional probe structures
Solution Approach 1:
The guide portion provides a reference for measuring the positional relationship with the contact portion, creating a feedback mechanism that enables detection of probe distortion. This feedback allows the system to identify when the tip portion is deviating from the center of the electrode pad, preventing decreased contact strength and increased electrical resistance
Data Source
AI summary
A probe includes a tip portion, an arm portion, a support portion, and a guide portion. The tip portion includes a contact portion that comes into contact with an object to be inspected. The arm portion has a cantilever structure including a connecting arm that links a free end and a fixed end, and the free end is connected to the tip portion. The support portion is connected to the fixed end. The guide portion is connected to an installation area of the arm portion oriented in a tip direction where the object to be inspected is located as viewed from the contact portion, and protrudes in the tip direction from the installation area.