Cantilever Substrate Holding Unit for Vertical Horizontal Orientation Flip
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current substrate processing systems require substrates to be positioned vertically or horizontally to accommodate different cleaning and treatment processes, lacking a convenient mechanism to transition between states for efficient processing.
Innovation Solution
A substrate processing system incorporating a substrate holding unit with cantilevers and holding parts that can descend, align, and ascend to securely flip substrates between vertical and horizontal states, allowing for versatile processing configurations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the substrate is held vertically for transport, then the substrate can be efficiently moved between processes, but the substrate cannot be directly placed in horizontal processing equipment
Solution Approach 1:
The substrate holding unit is designed with movable cantilevers that can dynamically change the substrate orientation from vertical to horizontal. The cantilevers can be positioned at different angles and heights, allowing the system to adapt between transport mode (vertical) and processing mode (horizontal) without requiring separate handling systems.
2Adaptability or versatility
If the substrate is held horizontally for processing, then the substrate can be accommodated in cleaning machines, but the substrate cannot be efficiently transported in vertical configuration
Solution Approach 1:
The holding unit enables dynamic reconfiguration of substrate orientation. During transport, the substrate is held vertically for efficiency; during processing, the cantilevers adjust to hold the substrate horizontally, allowing direct placement in cleaning and treatment equipment without intermediate handling steps.
3Adaptability or versatility
If multiple substrate handling positions are provided, then the substrate can be flipped between states, but the device complexity increases
Solution Approach 1:
The substrate holding unit is segmented into two independent cantilevers, each capable of independent movement and positioning. This segmentation allows the system to achieve substrate flipping and orientation change through coordinated movement of the two cantilevers, rather than requiring multiple complete holding units.
Solution Approach 2:
The two cantilevers serve multiple functions: they can independently support the substrate during transport, work together to flip the substrate between vertical and horizontal states, and provide stable holding during processing. This multi-functionality reduces the need for separate specialized devices for each operation.
Data Source
AI summary
A substrate processing system includes a substrate processing set and a substrate holding unit. The substrate processing set includes a substrate supporting part for supporting a vertical substrate. The substrate holding unit includes two cantilevers and two substrate holding parts. Each of the substrate holding parts is respectively located on each of the cantilevers. The two substrate holding parts are used for holding the substrate vertically. When the substrate holding unit moves next to the substrate processing set and the two substrate holding parts touch the substrate, the two substrate holding parts hold the substrate.