Capacitance Measurement System Using Non-Overlapping Signals
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Solution Overview
Problem
The challenge of accurately measuring device characteristics, particularly capacitance, becomes increasingly difficult as device sizes decrease, leading to severe impacts on circuit functionality.
Innovation Solution
A system and method for measuring capacitance of a device-under-test (DUT) using a capacitance measurement device that generates non-overlapping periodic signals and applies supply voltages in specific configurations to minimize errors and accurately calculate capacitance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If device size is reduced to meet scaling trends, then device density and integration are improved, but measurement precision of device characteristics deteriorates
Solution Approach 1:
The patent introduces test structures (intermediary elements) with known characteristics that are coupled to the device under test. These test structures act as mediators to enhance the measurability of small device characteristics by providing reference points and amplifying the measurement signal, thereby enabling precise capacitance measurement of scaled-down devices.
Solution Approach 2:
The patent employs multiple measurement frequencies and voltage levels to characterize the device under test. By varying measurement parameters (frequency, voltage) and analyzing the responses, the system can accurately determine capacitance values even for very small devices, overcoming the limitations imposed by device scaling.
2Ease of operation
If conventional measurement methods are used for scaled devices, then measurement simplicity is maintained, but measurement accuracy deteriorates due to error influence
Solution Approach 1:
The patent implements a measurement system that uses feedback from test structure responses to compensate for errors in capacitance measurement. The system measures the characteristics of test structures with known values, compares them to expected values, and uses this feedback information to correct measurements of the device under test, thereby maintaining accuracy without complicating the measurement process.
Solution Approach 2:
The patent performs preliminary characterization of test structures before actual device measurement. By pre-calibrating the measurement system using test structures with known characteristics, the system establishes reference data that simplifies subsequent measurements while ensuring high accuracy through pre-established error compensation parameters.
Data Source
AI summary
The present disclosure provides a system of measuring capacitance of a device-under-test (DUT). The system includes first switch, second switch, and a capacitance measurement device. The first switch is configured to receive a supply voltage. The first and second switches are electrically connected to the DUT. The capacitance measurement device is configured to provide a first pair of non-overlapping periodic signals with a first frequency, and a second pair of non-overlapping periodic signals with a second frequency. The second frequency is β times the first frequency. When the first switch and the second switch receive the first pair of non-overlapping periodic signals, a first current is transmitted through the first switch and the second switch. When the first switch and the second switch receive the second pair of non-overlapping periodic signals, a second current is transmitted through the first switch and the second switch.