Capacitance Element with Perpendicular Electrode Arrangement
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Solution Overview
Problem
Capacitance elements with high equivalent series resistance (ESR) due to long upper electrode shapes, which increases resistance and requires minimal interlayer conductors to maintain dielectric integrity, posing a challenge in reducing ESR without increasing conductor number or area.
Innovation Solution
A capacitance element configuration with upper electrodes arranged perpendicular to the connection conductor direction, reducing distance ratios and using equal widths in both directions for electrodes, and employing lower resistance connection conductors to minimize resistance and ESR.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the upper electrodes have a long shape perpendicular to the arrangement direction, then the electrode area increases, but the resistance increases and ESR becomes large
Solution Approach 1:
The patent changes the arrangement dimension of upper electrodes from the Y-axis direction (parallel to connection conductors) to the X-axis direction (perpendicular to connection conductors). This dimensional change allows the electrodes to maintain large area while reducing the distance to interlayer conductors, thereby lowering resistance and ESR.
2Reliability
If the number of interlayer conductors is increased to reduce ESR, then the ESR decreases, but the dielectric constant varies due to oxygen escape through contact holes
Solution Approach 1:
The patent uses only two interlayer conductors (minimum necessary) instead of increasing their number or area. By optimizing the positioning and shape of these minimal conductors, the patent achieves low ESR while minimizing contact holes that would cause oxygen escape and dielectric constant variation.
3Ease of manufacture
If the upper electrodes are arranged parallel to the connection conductor direction, then the layout is simple, but the distance from electrode edges to interlayer conductors is large, increasing resistance
Solution Approach 1:
The patent creates an asymmetric arrangement where upper electrodes are positioned perpendicular to connection conductors rather than parallel. This asymmetric configuration optimizes the distance relationship between electrodes and interlayer conductors, reducing resistance while maintaining manufacturing feasibility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The configuration effectively reduces the resistance of upper electrodes and achieves a capacitance element with low ESR without increasing the number or area of interlayer conductors, maintaining dielectric integrity.
Implementation Method 1
a first dielectric layer on the first lower electrode, a second dielectric layer on the second lower electrode... four capacitance forming units are formed
Implementation Method 2
a first interlayer conductor in contact with the first upper electrode, a second interlayer conductor in contact with the second upper electrode...
Data Source
AI summary
A capacitance element that includes a first lower electrode and a second lower electrode arranged adjacent to each other in a Y-axis direction on a substrate. A first dielectric layer is on the first lower electrode, and a second dielectric layer is on the second lower electrode. A first upper electrode and a second upper electrode are arranged adjacent to each other in an X-axis direction on the first dielectric layer, and a third upper electrode and a fourth upper electrode are arranged adjacent to each other in an X-axis direction on the second dielectric layer. Interlayer conductors are respectively in contact with the first through fourth upper electrodes. A first connection conductor connects the second interlayer conductor and the fourth interlayer conductor to each other.