Capacitance Sensor Layout for Transport Position Calibration

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Solution Overview

Problem

Existing measuring systems lack an efficient method to accurately determine the position and deviation of a measuring device during transportation, particularly in semiconductor processing systems.

Innovation Solution

A measuring system that utilizes a disc-shaped measuring device with a central electrode and peripheral electrodes to acquire electrostatic capacitance values, reflecting distance and horizontal deviation from a target electrode, allowing for precise measurement of position shift during transportation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a teaching jig with multiple plates and target pins is used for calibration, then the transport position can be calibrated, but the measurement process becomes complex and requires manual positioning by an operator

Engineering Contradiction:

Improvetransport position calibration accuracyVSAvoidteaching jig structure complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The sensor is divided into multiple independent electrodes (central electrode and multiple peripheral electrodes) that can independently measure different positional parameters. This segmentation allows the system to obtain comprehensive position information from a single simplified device rather than requiring a complex multi-plate teaching jig.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent replaces the mechanical teaching jig system with an electrostatic capacitance-based measurement system. By using electrostatic fields and capacitance measurements, the system eliminates the need for physical teaching jigs and manual mechanical positioning, achieving automated high-precision measurement.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If manual positioning by an operator is used, then the teaching jig can be positioned, but the measurement process is time-consuming and less efficient

Engineering Contradiction:

Improveposition calibration accuracyVSAvoidcalibration time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The measuring device performs self-positioning and self-measurement by automatically detecting its position relative to the reference electrode through capacitance measurements. The device does not require external manual positioning or complex teaching procedures, enabling rapid automated calibration.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The system measures position by detecting changes in electrostatic capacitance parameters rather than relying on mechanical positioning. By monitoring capacitance variations across multiple electrodes, the system可以快速 determine positional deviations and perform calibration without time-consuming manual operations.

Inventive Principle:

Principle #35Parameter changes

3Device complexity

If only a single sensor point is used, then the device structure is simple, but the ability to measure horizontal deviation is insufficient

Engineering Contradiction:

Improvesensor structure simplicityVSAvoidhorizontal deviation measurement accuracy

Core Design Contradiction:

Device complexityVSMeasurement precision

Solution Approach 1:

The sensor is segmented into a central electrode and multiple peripheral electrodes arranged in specific patterns. This segmentation enables the single sensor to simultaneously measure both vertical distance (through the central electrode) and horizontal deviation (through differential measurements from peripheral electrodes), maintaining structural simplicity while achieving comprehensive measurement capability.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables easy measurement of position shift and confirms normal transportation, allowing for accurate adjustment of transport positions, thereby improving the precision and reliability of the measuring system.

Implementation Method 1

The first sensor includes a central electrode and peripheral electrodes. The central electrode acquires electrostatic capacitance for reflecting a distance with the target electrode. The peripheral electrodes are disposed around the central electrode to acquire electrostatic capacitance for reflecting an amount of deviation in a horizontal direction with respect to the target electrode.

Methodology Applied

Scientific EffectElectrostatic capacitance: Capacitance

Data Source

PatentUS12264947B2Measuring system, measuring device, and measuring method

Publication Date: 2025.04.01 TOKYO ELECTRON LTD

AI summary

A measuring system according to an exemplary embodiment acquires a measurement value indicating electrostatic capacitance between a measuring device and a transport fork for transporting the measuring device. The transport fork includes a target electrode. The measuring device includes a first sensor provided on a base board. The first sensor includes a central electrode and peripheral electrodes. The central electrode acquires electrostatic capacitance for reflecting a distance with the target electrode. The peripheral electrodes are disposed around the central electrode to acquire electrostatic capacitance for reflecting an amount of deviation in a horizontal direction with respect to the target electrode of the transport fork.