Capacitance Transducer Pressure Releasing Flow Channel
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Solution Overview
Problem
Capacitance type transducers using MEMS technology face issues with excessive deformation and damage of vibrating electrode films under high pressure, leading to deteriorated frequency characteristics and sensitivity, particularly in low-frequency ranges, and existing solutions complicate manufacturing and reliability.
Innovation Solution
A capacitance type transducer design that incorporates a pressure releasing flow channel formed by a gap between a protruding portion on the back plate and the vibrating electrode film, which increases in area relative to the vibrating electrode film to release pressure, thereby preventing damage and maintaining frequency characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a hole is provided in the vibrating electrode film to release pressure, then damage to the vibrating electrode film under excessive pressure is prevented, but frequency characteristics deteriorate and sensitivity in low-frequency range declines
Solution Approach 1:
The pressure release function is segmented from the vibrating electrode film itself and transferred to a separate plug section that is divided by slits. This allows the vibrating electrode film to remain intact for optimal frequency characteristics while the plug section handles pressure release independently.
Solution Approach 2:
The plug section acts as an intermediary element between the vibrating electrode film and the external environment. It provides a pressure release pathway without requiring modifications to the vibrating electrode film, thus maintaining frequency characteristics while preventing damage under excessive pressure.
2Reliability
If a plug section divided by slits is provided to release pressure, then excessive pressure is released, but manufacturing process becomes more complicated and reliability decreases due to detachment risk
Solution Approach 1:
The plug section is merged with the vibrating electrode film through integral formation in the same semiconductor manufacturing process. This eliminates the need for separate assembly steps and prevents detachment issues by making the plug section an inseparable part of the vibrating electrode film structure.
Solution Approach 2:
The plug section is designed to automatically perform pressure release based on pressure differential alone, without requiring external control mechanisms. The slits in the plug section open naturally when pressure exceeds a certain threshold, providing self-regulating pressure relief functionality.
3Volume of moving object
If the vibrating electrode film is made thinner to achieve smaller size, then downsizing is achieved, but the risk of deformation and breakage under excessive pressure increases
Solution Approach 1:
The plug section with slits is provided in advance as a protective mechanism. When excessive pressure occurs, the slits open to release pressure before the thin vibrating electrode film can deform or break, thus cushioning the thin film structure from pressure damage.
Solution Approach 2:
The vibrating electrode film is designed as a thin flexible film to achieve miniaturization, while the plug section provides a complementary pressure release mechanism that protects the thin film from exceeding its deformation limits under excessive pressure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses excessive deformation and damage to the vibrating electrode film, improving the reliability and performance of the transducer while maintaining favorable frequency characteristics during acoustic detection.
Implementation Method 1
a flow channel which releases excessive pressure applied to the vibrating electrode film by relative movement of the protruding portion and the vibrating electrode film
Implementation Method 2
pressure releasing flow channel formed by a gap between a protruding portion on the back plate and the vibrating electrode film
Implementation Method 3
capacitance type transducer which converts a displacement of a vibrating electrode film into a change in capacitance between the vibrating electrode film and a back plate
Data Source
AI summary
A capacitance type transducer has a substrate with an opening on a surface thereof, a back plate arranged to oppose the opening of the substrate, and a vibrating electrode film arranged to oppose the back plate across a gap between the vibrating electrode film and the back plate. The capacitance type transducer converts a displacement of the vibrating electrode film into a change in capacitance between the vibrating electrode film and the back plate. The capacitance type transducer has a pressure releasing flow channel which is an air flow channel formed by a gap between a part of the vibrating electrode film and a protruding portion integrally provided on the back plate.