Liquid Crystal Device Capacitive Element Trench Structure
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Solution Overview
Problem
Existing liquid crystal devices face challenges in miniaturization due to coverage defects and difficulty in achieving narrow pixel pitches, particularly when capacitive elements are disposed in trenches, which hinder the effective formation of a light shielding region.
Innovation Solution
The liquid crystal device incorporates a capacitive element with a first capacitive electrode extending along the light shielding region, covered by a capacitive insulation layer that covers at least three consecutive surfaces, and a second capacitive electrode facing these surfaces through the insulation layer, formed using a manufacturing method involving a recess and spacer structure to achieve a plug-shaped first capacitive wiring, allowing for reduced width and improved miniaturization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If a capacitive element is disposed in a trench to increase electrical capacity, then the electrical capacity is improved, but coverage defects of the film occur and pixel pitch cannot be narrowed
Solution Approach 1:
The capacitive element structure transitions from a planar configuration to a three-dimensional configuration by forming a recess in the substrate. The first capacitive electrode is positioned at the bottom of the recess while the second capacitive electrode is positioned at the opening, creating a vertical stacking arrangement that increases electrical capacity without expanding the planar footprint, thereby enabling narrower pixel pitches while maintaining manufacturing precision
2Quantity of substance
If a capacitive element is disposed in a trench to increase electrical capacity, then the electrical capacity is improved, but the light shielding region width cannot be reduced
Solution Approach 1:
The invention utilizes the depth dimension by forming a recess in the substrate to accommodate the capacitive element. This vertical arrangement allows the light shielding region width to be reduced while maintaining the electrical capacity, as the capacitance is enhanced through the vertical stacking of electrodes rather than through horizontal expansion
3Volume of moving object
If the pixel pitch is narrowed to achieve miniaturization, then the device size is reduced, but coverage defects occur when using trench structures
Solution Approach 1:
The invention applies a spacer to the side wall of the recess before forming the first capacitive electrode. This preliminary action ensures proper positioning and spacing of the electrode within the recess, preventing coverage defects during subsequent film formation processes while enabling narrower pixel pitches for device miniaturization
Data Source
AI summary
A liquid crystal device includes, on a first base material, pixels and a capacitive element disposed in a light shielding region between the pixels, and the capacitive element includes a first capacitive wiring disposed along the light shielding region, a dielectric layer that covers at least consecutive three surfaces (a surface O, a surface P and a surface Q) of the first capacitive wiring, and a second capacitive wiring that faces at least the consecutive three surfaces of the first capacitive wiring through the dielectric layer.