Capacitive Gas Sensor with Buried Electrode

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Solution Overview

Problem

Conventional gas sensors face inefficiencies due to the 'coffee-ring' effect and interdigital structure issues, which lead to non-homogeneous current distribution and reduced sensitivity, as they rely on localized graphene clusters and edge conductance rather than the entire sensor area.

Innovation Solution

A gas-sensitive device with a capacitive design featuring a top electrode and a buried electrode, where the gas-sensitive layer is formed by dropping ink onto an insulation layer, allowing for even impedance measurement across the sensor area, independent of localized clusters or coffee stain effects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If an interdigital structure with printed graphene sensor layer is used, then the sensor can be manufactured with simple printing processes, but the coffee-ring effect and localized graphene clustering reduce the effective sensing area and sensitivity

Engineering Contradiction:
Improveprinting process simplicityVSAvoidsensor layer homogeneity
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The sensor structure is segmented into distinct functional zones: a central sensing area with optimized electrode geometry and peripheral contact pads. The interdigital electrodes are designed with specific finger width, spacing, and number of pairs to maximize the active sensing area while minimizing edge effects. This segmentation allows the central region to be optimized for gas detection while peripheral regions handle electrical connections, resolving the conflict between simple manufacturing and precise sensor performance.

Inventive Principle:
Principle #1Segmentation

2Measurement precision

If the entire sensor area is utilized for gas detection, then sensitivity and efficiency are maximized, but the coffee-ring effect causes non-homogeneous current distribution concentrating current at edges

Engineering Contradiction:
Improvegas detection sensitivityVSAvoidcurrent distribution uniformity
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The electrode geometry employs asymmetric design where the central sensing area has optimized finger dimensions and spacing that differ from peripheral contact regions. The interdigital electrodes feature specific aspect ratios and spacing patterns that create more uniform electric field distribution across the active area, counteracting the natural tendency for current concentration at edges caused by the coffee-ring effect. This asymmetric optimization ensures reliable and uniform current distribution throughout the sensing area.

Inventive Principle:
Principle #4Asymmetry

3Ease of manufacture

If localized graphene clusters are used between electrodes, then the printing process is simplified, but only a small current path contributes to sensitivity instead of the whole sensor area

Engineering Contradiction:
Improveprinting process feasibilityVSAvoidsensor area utilization efficiency
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The electrode parameters (finger width, spacing, number of pairs, and overall geometry) are specifically optimized to work with printed graphene layers that exhibit natural clustering. By adjusting these parameters, the design ensures that even with non-uniform graphene distribution, the electric field and current paths effectively utilize the entire sensor area. This parameter optimization transforms the limitation of localized clusters into an acceptable manufacturing reality while maintaining high area utilization efficiency for gas detection.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances sensitivity by utilizing the entire sensor area for gas detection, reducing the impact of localized non-homogeneities and the coffee-ring effect, enabling effective detection of multiple gases with improved accuracy and efficiency.

Implementation Method 1

The adsorption or desorption of gas molecules are reflected by the change of the electrical resistance of the device

Methodology Applied
Scientific EffectAdsorption: Adsorption

Data Source

PatentEP4001906B1Gas-sensitive device
Publication Date: 2024.10.02 INFINEON TECHNOLOGIES AG
  • EP4001906B1 patent drawingFigure 1~2
  • EP4001906B1 patent drawingFigure 3
  • EP4001906B1 patent drawingFigure 4

AI summary

A gas-sensitive device (10) is disclosed. The gas-sensitive device comprises a substrate structure (20), and a gas sensitive capacitor, the gas sensitive capacitor comprising a first capacitor electrode (40) in form of a gas-sensitive layer (45) on a first main surface region of an insulation layer (30), and a second capacitor electrode (60) in form of a buried conductive region below the insulation layer (30), so that the insulation layer (30) is arranged between the first and second capacitor electrode (40, 60); wherein the gas-sensitive layer (45) comprises a sheet impedance which changes in response to the adsorption or desorption of gas molecules. Also a method for operating the gas-sensitive device (10) is described. Furthermore, a multi-gas sensor comprising one or more gas sensitive-devises is disclosed.