Capacitive Precursor Level Sensing for High-Temperature Vessels
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Solution Overview
Problem
Existing methods for monitoring the amount of solid precursor in semiconductor manufacturing processes are inaccurate and complex, especially in high-temperature environments, due to challenges in level sensing systems resolving and maintaining precision and consistency.
Innovation Solution
A capacitive sensor system using at least two electrodes arranged in a substantially parallel manner within the precursor vessel, applying an electrical signal to create an electric field and capturing capacitance data to determine the precursor level, with optional mathematical modeling and calibration for precise measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional level sensing systems are used for solid precursor monitoring, then the system complexity is reduced, but the measurement precision and accuracy deteriorate significantly
Solution Approach 1:
The patent replaces conventional mechanical level sensing systems with a capacitive sensing system that uses electrical fields to measure precursor levels. The capacitive sensor detects changes in capacitance caused by the dielectric properties of the solid precursor material, eliminating the need for mechanical contact or complex optical systems while achieving high measurement precision in high-temperature environments
Solution Approach 2:
The patent utilizes changes in dielectric constant and capacitance values as the precursor level changes. By monitoring these electrical parameter variations, the system achieves accurate measurement of solid precursor levels without requiring complex mechanical or optical instrumentation, thus improving measurement precision while keeping the device relatively simple
2Reliability
If existing sensing systems operate in high-temperature environments, then the manufacturing process continues without interruption, but the reliability and consistency of measurement deteriorate
Solution Approach 1:
The capacitive sensing system replaces temperature-sensitive mechanical or optical sensors with an electrical field-based measurement system. The capacitive sensor can withstand high temperatures without degradation, maintaining reliable and consistent measurements in the high-temperature environment typical of semiconductor manufacturing processes
Solution Approach 2:
The capacitive sensing system operates through electrical fields that are not affected by the high-temperature environment or the chemical composition of the precursor material. This creates an effectively inert measurement environment where temperature variations do not compromise measurement reliability or consistency
3Productivity
If manual monitoring of precursor levels is performed, then the equipment complexity is minimized, but the productivity and response time deteriorate
Solution Approach 1:
The capacitive sensing system provides continuous real-time feedback on precursor levels to the control system. This automated feedback mechanism enables the system to monitor precursor consumption continuously, predict when vessel changes are needed, and schedule replacements proactively, significantly improving productivity and resource utilization without requiring manual intervention
Solution Approach 2:
The capacitive sensor serves multiple functions: it measures precursor levels, tracks consumption rates, predicts remaining useful life of precursor material, and triggers alerts for vessel replacement. This multi-functionality consolidates what would otherwise require multiple separate systems into a single integrated solution, improving productivity while keeping the added complexity manageable
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the accuracy and consistency of precursor measurement, enabling near real-time monitoring and reducing tool downtime, allowing for effective resource planning, error detection, and quality control.
Implementation Method 1
applying an electrical signal to each one of said electrodes to electrically excite them such that an electric field is formed inside said vessel's interior portion
Implementation Method 2
capturing sensing data indicative of capacitance related to the amount of precursor within said electric field
Data Source
AI summary
In the present description, a capacitive sensor system is described by means of which the amount of solid precursor in a precursor vessel for a semiconductor manufacturing process can be determined and to a method for using the same. The system comprises at least two electrodes that are arranged in a substantially parallel manner within the precursor vessel.