Capacitive Pressure Cell Thermal Shock Compensation
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Solution Overview
Problem
Existing pressure measuring cells face challenges in accurately compensating for rapid temperature changes, leading to measurement errors due to the delayed detection of temperature changes by additional sensors, and the complexity and cost of manufacturing these cells with integrated temperature sensors, especially in miniaturized forms.
Innovation Solution
A method for compensating measured values in capacitive pressure measuring cells using a measuring capacitance and at least one reference capacitance, where the pressure-induced and thermal shock-induced capacitance changes are determined and interpolated using polynomial functions, allowing for real-time compensation without the need for additional temperature sensors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an additional temperature sensor is installed in the connecting layer between the membrane and the base body to detect thermal shocks, then the detection of rapid temperature changes is improved, but the device complexity and manufacturing cost increase
Solution Approach 1:
The patent extracts the temperature sensing function from a separate physical sensor and relocates it to the existing reference capacitance structure. By measuring capacitance changes in the reference electrode arrangement, the system derives temperature information without requiring additional temperature sensors in the membrane connecting layer, thus reducing device complexity while maintaining thermal shock detection capability
Solution Approach 2:
The reference capacitance structure is given multiple functions: it serves both as a reference for pressure measurement compensation and as a temperature sensor for thermal shock detection. This multi-functionality eliminates the need for separate temperature sensing components, reducing overall device complexity while improving measurement precision
2Reliability
If two temperature sensors are used to compensate for thermal shocks, then the compensation capability is improved, but the manufacturing complexity and cost increase
Solution Approach 1:
The reference capacitance serves dual purposes: compensating for pressure measurement errors and detecting thermal shocks. This eliminates the need for a second dedicated temperature sensor, simplifying manufacturing while maintaining reliable thermal shock compensation capability
Solution Approach 2:
The patent merges the temperature sensing function with the reference capacitance structure. By combining these functions into a single component system, the manufacturing process is simplified as fewer separate components need to be installed and calibrated, while the compensation reliability is maintained through the capacitance-based temperature detection
3Measurement precision
If a second temperature sensor is installed in the connecting layer, then the detection of temperature gradients is improved, but the space requirements and manufacturing effort increase
Solution Approach 1:
The patent extracts the temperature gradient detection function from the physical temperature sensor and implements it through electrical measurement of capacitance changes in the reference electrode. This eliminates the need for physical installation in the connecting layer, reducing manufacturing effort and space requirements while maintaining detection precision
Solution Approach 2:
The patent replaces the mechanical/physical temperature sensor installation with an electrical field-based measurement approach. By using capacitance measurements of the reference electrode arrangement, the system detects temperature gradients without requiring physical sensors to be installed in the connecting layer, thus simplifying manufacturing and reducing space constraints
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enables accurate detection and compensation of thermal shocks in pressure measuring cells, improving measurement accuracy and reducing manufacturing complexity by eliminating the need for multiple temperature sensors, thus enhancing the reliability and cost-effectiveness of miniaturized pressure measuring devices.
Implementation Method 1
circular electrodes are preferably provided on one side of the base body facing the membrane and on the side of the membrane facing the base body, which together form a measuring capacitor the measuring signal of which is evaluated
Data Source
AI summary
The invention relates to various means for implementing a method for compensating measured values in capacitive pressure measuring cells using a measuring capacity and at least one reference capacity, comprising the following steps:determination of a pressure-induced capacitance change of the reference capacitance as a function of a pressure-induced capacitance change of the measuring capacitance,determination of a thermal shock-induced capacitance change of the reference capacitance as a function of a thermal shock-induced capacitance change of the measuring capacitance,measurement of the measuring capacitance and of the at least one reference capacitance,determination of the thermal shock-induced capacitance change of the measuring capacitance from a combination of the above dependencies,compensation of the measured measuring capacitance by the thermal shock induced capacitance change of the measuring capacitance, anddetermination and output of the pressure-induced capacitance change or a quantity derived therefrom.