Capacitive Remote Plasma Source for Lower-Cost Stable Generation
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Solution Overview
Problem
Conventional plasma processing systems face challenges due to the high cost of multiple RF sources, limited lifetime of anodized aluminum coatings in remote plasma generators, and the resulting degradation in wafer deposition/etch rates, film uniformity, and plasma coupling efficiency.
Innovation Solution
A remote plasma system is designed with a first and second tube, isolation components, and a capacitive element to generate a plasma efficiently, using existing RF generators and minimizing the need for costly ferrite cores.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple RF sources are used to generate plasma in different parts of the processing chamber, then plasma processing capability is improved, but system cost increases due to expensive RF delivery components
Solution Approach 1:
A single RF source is designed to perform multiple functions by generating plasma both within the processing chamber for substrate processing and in a remote plasma generator for chamber cleaning, eliminating the need for separate RF sources and reducing system cost
2Reliability
If anodized aluminum coating is used to protect aluminum interior walls, then protection from degradation is improved, but lifetime is reduced due to porosity and surface reactions
Solution Approach 1:
The surface properties of the aluminum interior walls are modified by applying anodized aluminum coating, which changes the surface parameters to provide protection while managing the inherent porosity through controlled anodization processes
3Productivity
If remote plasma generator operates for extended period, then productivity is improved, but plasma stability degrades due to coating deterioration
Solution Approach 1:
The system monitors plasma performance and coating condition over time, using feedback to optimize operating parameters and predict when coating replacement is needed, maintaining plasma stability throughout the coating's operational life
4Device complexity
If complete remote plasma generator system is used without replaceable components, then device complexity is reduced, but loss of substance increases due to inability to replace only the coating
Solution Approach 1:
The remote plasma generator is segmented into replaceable components, specifically the aluminum interior walls with anodized coating that can be independently replaced, allowing selective replacement of only the degraded parts rather than the entire system
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves cost-effective plasma generation with improved plasma stability and efficiency, reducing particulate generation and maintaining consistent performance over the lifetime of the components.
Implementation Method 1
a first capacitive element coupled to the first isolation component
Implementation Method 2
electrically isolating a first tube from a second tube, wherein a first capacitive element is coupled between the first tube and the second tube
Data Source
AI summary
Some embodiments are directed to a remote plasma system. The remote plasma system may include: a first tube; a second tube; a first isolation component coupled between a first end of the first tube and a first end of the second tube; a second isolation component coupled between a second end of the first tube and a second end of the second tube; and a first capacitive element coupled to the first isolation component.