Capacitive Sensor Angle Measurement via Segmented Regions
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Solution Overview
Problem
Current capacitive sensors face challenges in accurately measuring radiation parameters, particularly in determining the angle of incidence of radiation, due to limitations in sensitivity and resolution, especially when dealing with non-visible radiation and particle radiation.
Innovation Solution
The development of an incident capacitive sensor device with independently measurable sensor regions, utilizing a semiconductor on insulator configuration and strategically designed top plates and dielectric materials to block or allow radiation based on direction, allowing for capacitance measurements that indicate the angle of incidence by varying electron-hole pair generation and capacitance values.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional capacitive sensors are used for radiation measurement, then the device structure is simple, but the measurement precision and sensitivity for angle of incidence are insufficient
Solution Approach 1:
The sensor is divided into multiple independently measurable sensor regions (first sensor region and second sensor region) with different radiation exposure configurations. Each region measures capacitance independently, and the difference in capacitance values between regions is used to determine the angle of incidence, thereby improving measurement precision through spatial segmentation.
Solution Approach 2:
Different sensor regions are designed with different local qualities: the first sensor region is exposed to radiation through a first window, while the second sensor region is exposed through a second window with different geometric configuration. This local differentiation in radiation exposure geometry enables angle-sensitive capacitance measurements.
2Measurement precision
If multiple sensor regions with different radiation exposure are used to improve angle measurement accuracy, then the measurement precision improves, but the device complexity increases
Solution Approach 1:
The capacitive sensor structure serves multiple functions: it measures both the intensity of radiation and the angle of incidence simultaneously. The same sensor regions and readout circuitry used for basic radiation detection are also utilized for angle measurement by comparing capacitance differences, thereby achieving multi-functionality without proportionally increasing device complexity.
Solution Approach 2:
The invention changes the geometric parameters of radiation exposure (different window configurations, different exposure angles) to create angle-sensitive capacitance measurements. By varying the physical configuration of how radiation reaches different sensor regions, the system extracts angular information from capacitance changes without adding complex measurement apparatus.
3Adaptability or versatility
If the sensor is designed to measure multiple radiation types and wavelengths, then the adaptability improves, but the manufacturing precision requirements increase
Solution Approach 1:
The sensor utilizes a semiconductor substrate (such as silicon) that inherently responds to multiple types of radiation including visible light, UV, infrared, X-rays, and particle radiation. This composite response capability of the semiconductor material allows the sensor to detect various radiation types without requiring separate specialized sensor structures, thereby maintaining manufacturing feasibility while achieving broad adaptability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the sensitivity and accuracy of radiation angle measurement, enabling effective determination of radiation parameters across different wavelengths and types, including visible, UV, infrared, X-rays, and particle radiation, by leveraging the capacitance changes induced by radiation interaction with the sensor material.
Implementation Method 1
utilizing a semiconductor on insulator configuration and strategically designed top plates and dielectric materials to block or allow radiation based on direction, allowing for capacitance measurements that indicate the angle of incidence by varying electron-hole pair generation and capacitance values
Data Source
AI summary
A system that includes at least one capacitive sensor for least one angle of incidence component of radiation being measured striking the sensor. The measured capacitance of the sensor is affected by radiation striking the sensor. In some embodiments, the system includes multiple sensors where differences in the capacitive measurements of the sensors can be used to determine information about the radiation such as e.g. horizontal angle, directional angle, and dose.