Capacitive Distance Sensor with Compensation Electrodes for Tilt and Edge Error Correction

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Solution Overview

Problem

Capacitive distance sensors face measurement errors due to tilting and capacitive edge effects, leading to non-linear response behavior, which complicates calibration and evaluation, especially in precision applications like precision bearings and coordinate measuring machines.

Innovation Solution

Incorporating separate tilt compensation and edge effect compensation electrodes, which are designed to form auxiliary capacitances that counterbalance tilting errors and edge effects, allowing for a linear relationship between distance and measured capacitance, simplifying calibration and evaluation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a standard capacitive sensor electrode design is used, then the device structure is simple, but measurement errors occur due to tilting and edge effects resulting in non-linear response behavior

Engineering Contradiction:
Improvemeasurement accuracyVSAvoidsensor electrode structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The sensor electrode is segmented into a measurement electrode and multiple compensation electrodes (tilt compensation electrodes and edge effect compensation electrodes). Each electrode serves a specific function: the measurement electrode detects distance, while the compensation electrodes detect and enable correction of tilting and edge effects, thereby achieving linear response behavior and high measurement accuracy without excessive overall complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Compensation electrodes are introduced as intermediary elements that detect tilting and edge effects separately. These intermediaries provide additional measurement signals that are used to calculate correction factors, which are then applied to the main measurement to eliminate errors caused by tilting and edge effects.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If tilt compensation and edge effect compensation electrodes are added, then measurement accuracy and linear response behavior are achieved, but device complexity increases

Engineering Contradiction:
Improvedistance measurement accuracyVSAvoidnumber of electrodes
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The compensation electrodes serve multiple functions: they detect tilting, detect edge effects, and provide correction data for both types of errors. This multi-functionality allows the system to achieve high measurement accuracy with a relatively compact electrode structure, as the same compensation electrodes address multiple error sources simultaneously.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system changes electrical parameters (capacitance values) of the compensation electrodes to characterize tilting and edge effects. By measuring changes in capacitance of the compensation electrodes and using these parameter changes to calculate correction factors, the system achieves accurate distance measurement without requiring complex mechanical or optical correction mechanisms.

Inventive Principle:
Principle #35Parameter changes

3Stability of the object's composition

If a large sensor electrode is used to achieve approximate linear behavior, then linearity improves, but spatial resolution decreases

Engineering Contradiction:
Improveresponse linearityVSAvoidspatial resolution
Core Design Contradiction:
Stability of the object's compositionVSMeasurement precision

Solution Approach 1:

Instead of using a single large electrode that provides approximate linearity, the system segments the sensing area into a smaller measurement electrode and separate compensation electrodes. This segmentation allows the measurement electrode to maintain high spatial resolution while the compensation electrodes provide the additional information needed to achieve exact linear response behavior through error correction.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The capacitive distance sensor achieves precise, real-time distance measurement with reduced calibration complexity and increased accuracy, enabling continuous monitoring of deviations from target distances in precision applications.

Implementation Method 1

the sensor electrode, together with an opposite (surface) area of the object, is designed to form a capacitance that is dependent on the distance

Methodology Applied
Scientific EffectCapacitance: Capacitance

Implementation Method 2

measurement errors which are caused by capacitive edge effects, that is to say effects created by a deviation from the theoretically ideal scenario of infinitely extended capacitive areas

Methodology Applied
Scientific EffectCapacitance: Capacitance

Data Source

PatentUS12085386B2Capacitive distance sensor
Publication Date: 2024.09.10 HEXAGON INNOVATION HUB GMBH
  • US12085386B2 patent drawing
  • US12085386B2 patent drawing
  • US12085386B2 patent drawing

AI summary

A capacitive distance sensor for determining distances from an object, wherein the distance sensor has at least one sensor electrode and at least one compensation electrode. Deviations from an ideal parallel orientation of distance sensor and object and/or errors caused by capacitive edge effects can be compensated by means of the compensation electrode.