Capacitive Sensor Diaphragm Lever Mechanism
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Solution Overview
Problem
Existing capacitive sensor and switch devices require complex and costly through-hole formation for pressure sensing, which complicates the protection of sensitive diaphragm surfaces and increases production costs.
Innovation Solution
The design omits the through-hole by using the diaphragm's external side as the sensitive surface, allowing for easier protection with gel and incorporating a rocker structure with lever elements and electrodes that move perpendicular to the substrate, enabling effective force detection without the need for a through-hole.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a through-hole is formed through the substrate for pressure sensing, then pressure measurement capability is achieved, but device complexity and production cost increase
Solution Approach 1:
Instead of creating a through-hole through the substrate to access the diaphragm's sensitive surface, the patent inverts the approach by making the diaphragm's outer surface (facing away from substrate 10) the sensitive pressure-sensing surface. This eliminates the need for through-hole formation while maintaining pressure measurement capability, directly resolving the technical contradiction between measurement capability and device complexity.
2Measurement precision
If a through-hole is formed through the substrate, then pressure sensing is enabled, but production cost increases
Solution Approach 1:
The patent inverts the conventional pressure sensing approach by using the diaphragm's outer surface as the sensitive surface instead of requiring access through a substrate hole. This design eliminates complex through-hole formation steps, reduces material waste, and simplifies the overall manufacturing process, thereby reducing production costs while maintaining full pressure sensing capability.
3Measurement precision
If the sensitive diaphragm surface is located on the inner side requiring through-hole access, then pressure measurement is possible, but gel protection becomes difficult and costly
Solution Approach 1:
The patent inverts the location of the sensitive surface from the diaphragm's inner side (requiring through-hole access) to its outer side (facing away from the substrate). This allows gel to be applied directly to the accessible outer surface for protection, eliminating the difficulty and cost associated with filling through-holes with gel while maintaining pressure measurement functionality.
4Measurement precision
If electrodes are configured to move perpendicular to the substrate surface, then force detection sensitivity is improved, but device structure becomes more complex
Solution Approach 1:
The patent applies segmentation by dividing the electrode system into multiple independent electrodes (first electrode 20, second electrode 34, first counterelectrode 28, second counterelectrode 36) that can move independently perpendicular to the substrate. This segmentation allows each electrode to be optimally positioned and moved for maximum sensitivity while simplifying the overall structure compared to a single complex moving electrode assembly.
Solution Approach 2:
The patent utilizes the perpendicular dimension (z-axis) for electrode movement and positioning, creating a three-dimensional electrode arrangement rather than planar two-dimensional configuration. This dimensional approach enables sensitive force detection through vertical displacement while maintaining a relatively simple planar footprint and reducing in-plane structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach simplifies production, reduces costs, and extends the lifespan of the micromechanical components by facilitating easier gel application and enhancing the evaluation of physical pressures through oppositely directed movement components.
Implementation Method 1
The at least one lever element (18) is connected via, in each case, at least one first torsion spring (50) to the diaphragm inner side (14a) of the self-supporting region of the diaphragm
Implementation Method 2
via, in each case, at least one second torsion spring (52) to the substrate (10) or at least one layer (29a, 29b) deposited on the substrate surface (10a)
Implementation Method 3
via, in each case, at least one third torsion spring (54) to the first electrode (20) assigned to it
Implementation Method 4
A warping of the diaphragm is intended to trigger a change in the distance of the electrode from the counterelectrode, such that the physical pressure, differing from the reference pressure, at the diaphragm outer side (14b) of the diaphragm is capable of being determined on the basis of a change of a voltage between the electrode and the counterelectrode
Data Source
AI summary
A micromechanical component for a capacitive sensor or switch device, having a substrate having a substrate surface, a diaphragm mounted on the substrate surface having a self-supporting region, at least one lever element and at least one first electrode connected to the at least one lever element. The at least one lever element is connected to the diaphragm in such a way that when there is a warping of the self-supporting region of the diaphragm the at least one lever element is set into a rotational movement, whereby the at least one connected first electrode is set into a first adjustment movement oriented at an angle to the substrate surface. The at least one lever element and the at least one first electrode connected to the at least one lever element are situated between the substrate surface and the diaphragm inner side of the self-supporting region of the diaphragm.