Capacitive Sensor Diaphragm Nested Leg Pieces
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Solution Overview
Problem
Conventional acoustic sensors face challenges in increasing sensitivity while reducing size, as the area between leg pieces is not effectively utilized, leading to decreased sensitivity and potential warping issues due to the cantilevered support structure.
Innovation Solution
A capacitive sensor design where leg pieces are completely surrounded by the vibrating electrode plate, eliminating wasted regions and reducing sensor size, with slits allowing for easier flexure and stable support, thereby enhancing displacement and sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the area of the diaphragm is increased by extending it into the region between leg pieces, then the sensitivity improves, but the diaphragm becomes cantilevered and easily warped causing sensitivity variation
Solution Approach 1:
The leg pieces are positioned inside the boundary of the diaphragm, with the diaphragm extending beyond the leg pieces to surround them. This nested configuration allows the diaphragm to maintain full area without cantilevered portions, as the leg pieces are contained within the diaphragm's support structure rather than extending beyond it.
2Area of moving object
If the length of the leg pieces is shortened to increase diaphragm area, then the sensor size reduces, but the rigidity of leg pieces increases and displacement decreases
Solution Approach 1:
Instead of simply shortening the leg pieces, the invention changes the spatial arrangement by positioning them inside the diaphragm boundary and providing support structures (anchors) on the substrate. This dimensional reorganization allows the leg pieces to be shorter while maintaining their flexibility and the diaphragm's displacement capability through proper support geometry.
3Measurement precision
If the diaphragm area is increased relative to substrate size, then the sensitivity improves, but the sensor size increases
Solution Approach 1:
The leg pieces are nested inside the diaphragm boundary, allowing the diaphragm to extend to the full substrate area without requiring additional space for protruding leg pieces. This maximizes the diaphragm-to-substrate area ratio, improving sensitivity while minimizing the overall sensor footprint.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design increases the area of the vibrating electrode plate, improves sensitivity, and reduces sensor size by utilizing the space between leg pieces effectively, minimizing warping and maintaining rigidity.
Implementation Method 1
a vibrating electrode plate (diaphragm) and a fixed electrode plate... converts acoustic vibration into an electrical signal
Implementation Method 2
capacitive sensor constituted by a capacitor structure that is made up of a vibrating electrode plate (diaphragm) and a fixed electrode plate
Data Source
AI summary
A chamber that penetrates vertically is formed in a silicon substrate. A diaphragm is arranged on the upper surface of the silicon substrate so as to cover the upper opening of the chamber. Leg pieces are provided in corner portions of the diaphragm, within the diaphragm. The diaphragm and the leg pieces are separated by slits, and the leg pieces extend in the diagonal directions of the diaphragm. The leg pieces are connected to the diaphragm at the ends on the outer peripheral side of the diaphragm, and the ends on the central side of the diaphragm are supported by anchors provided on the upper surface of the silicon substrate. A back plate is provided above the silicon substrate so as to cover the diaphragm, and a fixed electrode plate is provided on the lower surface of the back plate so as to oppose the diaphragm.