Capacitive Sensor Trench Porosification Method
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Solution Overview
Problem
Existing capacitive sensors with porous materials for gas and humidity detection face limitations in sensitivity due to the thickness of the porous dielectric material, which is often limited, and contamination issues during the production process.
Innovation Solution
The method involves etching trenches in a non-porous support material followed by porosification, filling these trenches with conductive material to form electrodes, and using a porous material with high open porosity and nano-porous characteristics to enhance sensitivity and reduce contamination, allowing for improved electrical insulation and detection of low humidity levels.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the thickness of the porous dielectric material is increased to improve sensitivity, then the sensitivity of the sensor is improved, but the production complexity increases requiring several deposits
Solution Approach 1:
The patent performs porosification of the support material before depositing the dielectric material. This preliminary action creates the porous structure in advance, allowing the dielectric material to be deposited within the porous network in a single step, thereby achieving thick porous dielectric layers without requiring multiple deposits while maintaining high sensitivity
2Ease of manufacture
If trenches are formed in porous material to create electrodes, then the sensor can be produced, but the trenches are less precisely defined and pores may be damaged
Solution Approach 1:
The patent inverts the conventional sequence by first forming trenches in a non-porous support material and then performing porosification on the trench walls and bottom. This inversion ensures that trenches are precisely defined in the solid material before pores are created, avoiding pore damage and maintaining precise trench geometry while enabling subsequent electrode formation
3Manufacturing precision
If trenches are etched before porosification, then trenches are more precisely defined and pore quality is improved, but the process sequence becomes more critical
Solution Approach 1:
The patent establishes a fixed preliminary sequence where trenches are etched into the non-porous support first, creating well-defined structures. Only after trench formation is the porosification step performed on the trench walls and bottom. This preliminary action approach locks in the precise trench geometry before pore creation, ensuring manufacturing precision while managing process sequence complexity through clear step ordering
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach results in a capacitive sensor with improved sensitivity and the ability to detect low humidity levels effectively, while minimizing contamination and reducing the complexity of the production process, enabling better electrical insulation and enhanced detection capabilities.
Implementation Method 1
have a capacity capable of varying depending on a quantity of gas or liquid adsorbed by this material
Implementation Method 2
This makes it possible to obtain a large developed surface area and to fix a large number of molecules, in particular water molecules when the capacitive sensor is a humidity sensor
Data Source
Figure 1A~1B
Figure 2A~2D
Figure 2E~4
AI summary
A method for producing a capacitive sensor, comprising steps consisting of: (a) forming trenches (105) in a support (100) made from at least one given material by etching said at least one given material, (b) making said given material porous at the walls and the bottom of the trenches, (c) filling the trenches (105) with a conductive material (110).