Capacitive Static Charge Monitoring for Insulative Fluid Tubes
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Solution Overview
Problem
In semiconductor manufacturing, the use of non-metallic materials in fluid-transporting systems to prevent metallic particle defects leads to concerns about electrostatic discharge due to low-conductivity solvents inducing static electric charges, causing friction-related charge separation and potential arcing in pipes made of materials like PTFE.
Innovation Solution
A measuring system comprising a flexible capacitor wrapped around an insulative tube, coupled with a static charge meter, is used to measure and manage static charges by adjusting fluid flow rates, employing a metallic plate for shielding and grounding to prevent electrostatic discharge.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If non-metallic materials are used in fluid-transporting systems, then metallic particle defects are prevented, but electrostatic discharge damage occurs due to static charge accumulation
Solution Approach 1:
A capacitor is introduced as an intermediary component between the insulative tube and the measuring device. The capacitor serves as a mediator that safely stores and transfers the static charge signal for measurement without causing direct electrostatic discharge, thus protecting the measurement system while enabling accurate static charge detection in non-metallic fluid transport systems
Solution Approach 2:
The measuring system provides feedback about static charge accumulation levels in the insulative tube. By continuously monitoring static charge and providing measurement data, the system enables real-time detection of charge buildup, allowing operators to take preventive measures before electrostatic discharge occurs, thus maintaining reliability while using non-metallic materials
2Productivity
If low-conductivity solvents are used, then fluid transport efficiency is maintained, but friction-related charge separation increases leading to static charge accumulation
Solution Approach 1:
The capacitor is positioned to proactively capture and store static charge as it accumulates during fluid transport, before the charge reaches dangerous levels that could cause electrostatic discharge. This preliminary action of charge storage prevents harmful effects while allowing continuous operation with low-conductivity solvents
Solution Approach 2:
The patent replaces direct electrical measurement methods with a capacitor-based measurement approach. Instead of using conventional electrical sensors that may be susceptible to electrostatic discharge damage, the system uses capacitor coupling to indirectly measure static charge, substituting a more reliable measurement mechanism that works safely with low-conductivity fluids
3Reliability
If insulative tubes are used, then electrostatic discharge is prevented through material insulation, but static charge accumulates on the inner surface causing measurement difficulties
Solution Approach 1:
The capacitor acts as an intermediary that couples to the inner surface of the insulative tube without direct electrical contact. It mediates between the static charge on the tube interior and the measuring device, enabling indirect measurement of static charge while maintaining the electrostatic protection provided by the insulative tube material
Solution Approach 2:
The capacitor is nested within or coupled to the structure of the insulative tube system, with the capacitor positioned to face the inner surface where static charge accumulates. This nested arrangement allows the capacitor to detect static charge through the tube wall or via close proximity coupling, enabling measurement while preserving the tube's insulative function
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively monitors and reduces static charge accumulation in pipes, preventing arcing and contamination, thereby maintaining production yield and quality in semiconductor manufacturing processes.
Implementation Method 1
measuring the static charge accumulated inside the section of the insulative tube
Implementation Method 2
A measuring system comprising a flexible capacitor wrapped around an insulative tube
Implementation Method 3
employing a metallic plate for shielding and grounding to prevent electrostatic discharge
Implementation Method 4
grounding to prevent electrostatic discharge
Implementation Method 5
low-conductivity solvents inducing static electric charges, causing friction-related charge separation
Implementation Method 6
a conductive layer, and a metallic layer opposite to the conductive layer
Data Source
AI summary
The present disclosure provides a measuring system. The measuring system includes an insulative tube, a capacitor and a static charge meter. The insulative tube is configured to allow a fluid to flow therethrough. The capacitor is disposed on a surface of a section of the insulative tube. The capacitor includes a first metallic layer, a second metallic layer opposite to the first metallic layer, and a dielectric layer sandwiched between the first metallic layer and the second metallic layer. The static charge meter is electrically coupled to the capacitor and configured to measure static charge accumulated inside the section of the insulative tube.