Capacitive Substrate Position Detection on Holder
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Solution Overview
Problem
Existing substrate holders lack an efficient method to detect and correct position deviations of substrates, leading to alignment difficulties and potential damage during processing due to accumulated robot errors, which are typically addressed through inefficient and error-prone manual sampling measurements.
Innovation Solution
A detection device comprising emitting and receiving electrodes connected to a signal source and detector, respectively, is integrated into the substrate holder to automatically determine the substrate's position by analyzing capacitance changes caused by the substrate's dielectric constant, allowing for precise and timely position detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If manual sampling measurement is used to detect substrate position, then device complexity is reduced, but measurement precision and detection timeliness deteriorate
Solution Approach 1:
The patent replaces the manual mechanical measurement system with an automatic capacitance detection system. The emitting and receiving electrodes form a capacitive sensor that automatically detects substrate position through electrical signals, eliminating the need for manual intervention while significantly improving measurement precision and timeliness.
Solution Approach 2:
The patent introduces the substrate's dielectric constant as an intermediary property for position detection. By measuring the capacitance change caused by the substrate's dielectric properties between the electrodes, the system indirectly and precisely determines substrate position without direct mechanical contact.
2Device complexity
If manual sampling measurement is used to detect substrate position, then device complexity is reduced, but productivity deteriorates
Solution Approach 1:
The automatic capacitance detection system replaces manual measurement operations, enabling continuous real-time monitoring of substrate position throughout the process. This dramatically improves detection efficiency and productivity while maintaining relatively simple device structure.
Solution Approach 2:
The patent implements continuous detection capability where the capacitance sensor can monitor substrate position continuously rather than through periodic manual sampling. This ensures real-time detection efficiency and allows for immediate correction of position deviations.
3Device complexity
If no position detection is implemented, then device complexity is minimized, but manufacturing precision deteriorates
Solution Approach 1:
The patent implements a feedback mechanism where the capacitance detection system continuously monitors substrate position and provides data for correction. The detected position information feeds back to control the robot's placement operations, enabling automatic compensation for position deviations and improving manufacturing precision.
Solution Approach 2:
The substrate holder system performs self-detection and self-correction of position deviations through the integrated capacitance sensor and control algorithm. The system automatically identifies and compensates for positioning errors without requiring external intervention, maintaining simple structure while improving precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides high efficiency, low error rate, and real-time position detection, reducing the risk of substrate damage and improving alignment accuracy by automatically correcting position deviations.
Implementation Method 1
transmitting a signal by a emitting electrode of the detection device; receiving the signal and generating an induction signal by a receiving electrode
Implementation Method 2
analyzing capacitance changes caused by the substrate's dielectric constant
Implementation Method 3
analyzing capacitance changes caused by the substrate's dielectric constant
Data Source
AI summary
A detection device, a substrate holder and a method for detecting a position of a substrate on a substrate holder are disclosed. The detection device of the present disclosure is used to detect the position of the substrate carried on the substrate holder, and the substrate holder includes a plurality of carrying positions, each of which is used to carry a substrate. The detection device includes an emitting electrode connected to a signal source, which is disposed at an edge of each carrying position and located at one of upper and lower sides of the substrate carried by the carrying position; and at least one receiving electrode connected to a detector, which is disposed opposite to the emitting electrode and located at the other of the upper and lower sides of the substrate carried by the carrying position.