Actuatable Capacitive Transducer for Quantitative In-Situ TEM Nanoindentation

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Solution Overview

Problem

Current nanoindentation techniques face challenges in providing definitive mechanistic explanations for features of force-displacement curves, particularly the pop-in transient, due to difficulties in imaging discrete nano-to-atomistic scale events, and existing in-situ TEM nanoindentation methods are limited by configurational and environmental constraints, resulting in qualitative or semi-quantitative data.

Innovation Solution

A novel actuatable capacitive transducer is developed for quantitative in-situ TEM nanoindentation, enabling the acquisition of force-displacement curves and simultaneous visualization of deformation, addressing the limitations of previous transducers by overcoming challenges such as space constraints, load and penetration depth requirements, and environmental factors like high vacuum and strong magnetic fields.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of information

If conventional nanoindentation techniques are used, then force-displacement curves can be obtained, but definitive mechanistic explanations for features like pop-in transients cannot be provided due to inability to image discrete nano-to-atomistic scale events

Engineering Contradiction:
Improvemechanistic informationVSAvoidimaging capability
Core Design Contradiction:
Loss of informationVSDevice complexity

Solution Approach 1:

The patent combines nanoindentation capabilities with transmission electron microscopy (TEM) imaging in a single integrated system. The nanoindenter is mounted within the TEM chamber, allowing simultaneous mechanical testing and direct visualization of deformation mechanisms at the nanoscale, thereby eliminating the information loss about mechanistic features like pop-in transients.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent introduces a specialized specimen holder as an intermediary component that bridges the nanoindenter and TEM system. This holder enables precise positioning and stabilization of the sample while accommodating both the indenter mechanism and TEM imaging requirements, facilitating the combined measurement and visualization functions.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Loss of information

If in-situ TEM nanoindentation is implemented, then direct visualization of deformation is achieved, but quantitative data acquisition is limited due to configurational and environmental constraints

Engineering Contradiction:
Improvequantitative measurement capabilityVSAvoidenvironmental constraints
Core Design Contradiction:
Loss of informationVSObject-affected harmful factors

Solution Approach 1:

The patent modifies key operational parameters to enable quantitative measurements in the TEM environment. This includes calibrating the indenter stiffness and load cell sensitivity specifically for vacuum conditions, compensating for thermal drift effects, and adjusting measurement protocols to account for the unique environmental constraints of the TEM chamber.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent implements feedback control mechanisms to maintain measurement accuracy in the TEM environment. Real-time monitoring and compensation of environmental factors such as thermal drift and vibration are employed, allowing the system to correct for disturbances and maintain quantitative measurement precision despite the challenging configurational and environmental constraints.

Inventive Principle:
Principle #23Feedback

3Volume of moving object

If the transducer is miniaturized to fit TEM space constraints, then in-situ TEM nanoindentation becomes possible, but load and penetration depth capabilities are reduced

Engineering Contradiction:
Improvetransducer sizeVSAvoidload capability
Core Design Contradiction:
Volume of moving objectVSForce

Solution Approach 1:

The patent employs a nested design where the miniaturized transducer components are arranged in a compact, space-efficient configuration within the TEM chamber. The indenter, load cell, and positioning mechanisms are integrated in a nested manner that maximizes the use of available space while maintaining structural integrity and measurement capabilities.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The patent replaces certain mechanical load transmission elements with alternative mechanisms better suited for miniaturization and TEM compatibility. This includes using capacitive sensing instead of traditional mechanical gauges and employing electrostatic actuation where possible, which allows for smaller form factors while maintaining or enhancing measurement precision.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution allows for direct correlation of specific transients in force-displacement curves with microstructural changes, providing quantitative data that was previously unattainable, enhancing the understanding of deformation mechanisms at the nanoscale.

Implementation Method 1

A first multi-plate capacitor (34) and a second multi-plate capacitor (36) are attached to conductive transducer body (32)

Methodology Applied
Scientific EffectCapacitance: Capacitance

Implementation Method 2

first multi-plate capacitor (34) and a second multi-plate capacitor (36) respectively include center plates (38, 40), and each include a displaceable electrode (42)

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Data Source

PatentEP1982408B1Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy
Publication Date: 2018.11.28 BRUKER NANO INC
  • EP1982408B1 patent drawingFigure 1
  • EP1982408B1 patent drawingFigure 2
  • EP1982408B1 patent drawingFigure 3

AI summary

The invention relates to an actuatable capacitive transducer, the newly invented actuatable capacitive transducer enabling quantitative in-situ nanoindentation in a transmission electron microscope (TEM) for the first time. The quantitative in-situ TEM nanoindentation technique involves indenting a sample to acquire a quantitative force-displacement curve and simultaneously visualizing/recording a stream of TEM images that show how the sample deforms while being indented. This simultaneous capability permits, for example, a direct correlation of a specific transient feature of the force-displacement curve to the sample's sudden change in microstructure.