Capacitor Group Alignment Detection for Display Substrates
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Solution Overview
Problem
Current display technology faces challenges in accurately detecting the alignment of film layers or substrates due to low contrast of alignment marks caused by the depth of field and field of view limitations of cameras, leading to reduced precision in substrate bonding processes.
Innovation Solution
A panel structure incorporating a capacitor group with misaligned electrodes on two substrates, where the capacitance values of the capacitors are used to detect alignment deviations and determine the direction of misalignment, enhancing detection accuracy and sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a camera is used to detect the bonding process, then the detection can be performed, but the alignment precision is limited due to low contrast of alignment marks
Solution Approach 1:
The patent replaces the optical detection system (camera) with an electrical detection system (capacitive sensor). The capacitive sensor detects alignment deviations through electrical field changes caused by dielectric constant differences, eliminating the information loss inherent in optical methods due to depth of field and field of view limitations.
Solution Approach 2:
The patent changes the detection parameter from optical intensity (camera-based) to electrical capacitance (sensor-based). By measuring capacitance values that change with alignment position, the system achieves higher precision without the information loss constraints of optical systems.
2Reliability
If camera detection is used, then the bonding process can be monitored, but the contrast of alignment mark boundary is low
Solution Approach 1:
The patent substitutes optical detection with electrical field-based detection. The capacitive sensor responds to changes in dielectric constant as alignment marks move, providing high-contrast electrical signals that are independent of optical illumination and alignment mark visual contrast.
Solution Approach 2:
The patent introduces a dielectric layer as an intermediary between the alignment marks and the detection system. This dielectric layer modulates the electrical field in response to alignment mark position, converting mechanical alignment information into electrical capacitance variations with high signal-to-noise ratio.
3Measurement precision
If camera detection is used, then alignment can be observed, but the detection sensitivity is reduced
Solution Approach 1:
The patent replaces complex optical detection systems with simpler electrical capacitance measurement systems. The capacitive sensor directly measures alignment deviations through electrical field changes, eliminating the need for complex optical paths, lenses, and image processing algorithms while achieving higher sensitivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method improves the detection accuracy and sensitivity of alignment deviations, allowing for precise alignment adjustments and improving the overall efficiency of the substrate bonding process.
Implementation Method 1
detecting each capacitance value of the first capacitor and the second capacitor; and determining an alignment situation of the first substrate and the second substrate according to a detection result
Data Source
AI summary
A panel structure, a display device, and an alignment detection method for the panel structure are provided in the present disclosure. The panel structure includes a first substrate and a second substrate which are oppositely disposed, and further includes a capacitor group including a first capacitor and a second capacitor. The first capacitor includes a first A electrode and a first B electrode which are oppositely disposed; the second capacitor includes a second A electrode and a second B electrode which are oppositely disposed; the first A electrode and the second A electrode are on the first substrate, and the first B electrode and the second B electrode are on the second substrate; the first B electrode is misaligned with the first A electrode along a first direction; and the second B electrode is misaligned with the second A electrode along an opposite direction of the first direction.