Capacitor Auxiliary Bodies for Array Substrate Step Coverage
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Solution Overview
Problem
The decrease in capacitance value of capacitors in array substrates due to reduced width and increased thickness of metal pole plates, which degrades display effect, especially with increased display resolution and refresh rates.
Innovation Solution
Incorporating auxiliary bodies with additional pole plates connected in parallel to the main capacitor body, allowing for increased capacitance without expanding the capacitor's footprint on the substrate, by arranging these auxiliary bodies in different planes and connecting them electrically.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the width of metal pole plate is reduced and thickness is increased to achieve better step coverage, then the step coverage is improved, but the capacitance value is significantly decreased
Solution Approach 1:
The patent introduces auxiliary bodies extending in a direction different from the main pole plates, utilizing the vertical dimension and lateral extension to create additional capacitance. The auxiliary bodies include third and fourth pole plates that extend in a direction different from the first and second pole plates, forming capacitance in an additional dimensional space without increasing the planar footprint.
Solution Approach 2:
The capacitor is divided into a main body (first and second pole plates) and auxiliary bodies (third and fourth pole plates). This segmentation allows the main structure to maintain proper step coverage while the auxiliary segments provide additional capacitance through parallel connection, effectively separating the step coverage function from the capacitance accumulation function.
2Measurement precision
If the width of metal pole plate is reduced to increase display resolution, then the display resolution is improved, but the capacitance value is significantly decreased
Solution Approach 1:
By introducing auxiliary bodies that extend in a different direction and utilizing vertical stacking with insulation layers, the patent creates additional capacitance volume without increasing the horizontal area occupied by the capacitor, thus maintaining high display resolution while compensating for reduced capacitance.
Solution Approach 2:
The auxiliary bodies are nested within or around the main capacitor structure, with third and fourth pole plates positioned relative to the first and second pole plates through insulation layers. This nesting allows additional capacitance to be embedded within the existing capacitor footprint without requiring additional planar space.
3Manufacturing precision
If the thickness of insulation layer is increased to achieve better step coverage, then the step coverage is improved, but the distance between pole plates increases and capacitance value decreases
Solution Approach 1:
The patent creates additional capacitance pathways by introducing auxiliary bodies that extend laterally and vertically, compensating for the increased insulation layer thickness. The third and fourth pole plates form capacitance with the main pole plates through multiple insulation layers, effectively creating capacitance in an extended three-dimensional space.
Data Source
AI summary
A capacitor, an array substrate and a method for manufacturing the same, and a display panel are provided. The capacitor includes a main body including a first pole plate and a second pole plate disposed opposite to each other, and the capacitor further includes at least one auxiliary body. Any one of the at least one auxiliary body includes a third pole plate and a fourth pole plate disposed opposite to each other, and neither the third pole plate nor the fourth pole plate extends in a plane where the first pole plate is located or a plane where the second pole plate is located. The main body is connected in parallel with the at least one auxiliary body. The array substrate includes a transistor and the capacitor provided by the present disclosure, and the transistor is electrically connected to the capacitor.