Capacitor Coating Composition for High-Aspect-Ratio Pattern Collapse Prevention
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Solution Overview
Problem
High-aspect-ratio capacitors in semiconductor devices are prone to collapse during the wet etching process due to high surface tension of washing liquids and lack of effective materials with low surface tension, leading to increased production costs and reduced productivity.
Innovation Solution
A coating composition comprising silane or phosphorus compounds with specific chemical structures is applied to capacitors to achieve a contact angle of 80°-140° with water, reducing the force causing collapse and enabling successful spin drying without pattern collapse.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the aspect ratio of capacitors is increased to achieve higher integration density, then the capacitance capacity is improved, but the capacitor patterns are prone to collapse during wet etching and washing processes
Solution Approach 1:
The patent applies a coating composition to capacitor patterns before the wet etching and washing processes. This preliminary coating prevents collapse during subsequent processing by modifying surface properties, allowing high-aspect-ratio patterns to maintain structural integrity throughout the fabrication sequence.
Solution Approach 2:
The coating composition changes the surface tension parameters of the capacitor pattern surface. By adjusting the contact angle between the washing liquid and the pattern surface, the patent reduces the capillary forces that cause collapse, enabling stable processing of high-aspect-ratio structures.
2Ease of manufacture
If conventional washing liquids with high surface tension are used, then the washing process is simple, but the capacitor patterns collapse during spin drying
Solution Approach 1:
The coating composition acts as an intermediary layer between the capacitor patterns and the washing liquid. This intermediate coating modifies the interaction by reducing surface tension effects and adjusting wetting properties, preventing direct capillary action that would cause pattern collapse during washing and spin drying.
3Reliability
If surfactants or alcohols are used to reduce surface tension, then pattern collapse is partially prevented, but production cost increases and the effect is insufficient for very high aspect ratios
Solution Approach 1:
The patent uses a composite coating composition containing fluorinated compounds, silane compounds, and/or phosphorus compounds. This composite material provides synergistic effects that achieve superior surface tension reduction and pattern protection compared to single surfactant or alcohol systems, enabling effective processing of very high-aspect-ratio capacitors.
4Force
If the contact angle of washing liquid on capacitor patterns is reduced, then the force causing collapse is reduced, but no existing materials achieve sufficiently low surface tension
Solution Approach 1:
The patent achieves extreme contact angle values (near 90 degrees) by using fluorinated compounds with very low surface tension. These compounds fundamentally change the surface energy parameters, creating conditions where washing liquids exert minimal capillary forces on vertical patterns, enabling stable processing of capacitors with aspect ratios of 5:1 or higher.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The coating composition effectively prevents capacitor collapse during the washing process, reducing production costs and increasing productivity by allowing uniform application and easy removal, while maintaining the integrity of capacitor patterns.
Implementation Method 1
The force of causing the collapse of the patterns formed on the substrate is in proportion to the surface tension of the liquid used in the pattern formation and washing process
Implementation Method 2
the cosine value of the contact angle of the liquid on against the patterns
Data Source
AI summary
Disclosed herein is a coating composition for preventing the collapse of a capacitor, comprising a silane compound or a phosphorus compound. The coating composition can adjust a contact angle with regard to water on a substrate, thereby preventing the collapse of capacitor patterns on the substrate.