Capacitor-Based Current Measurement Apparatus for Semiconductor Testing

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Solution Overview

Problem

Conventional current measurement tools for electronic and semiconductor devices require expensive precision amplifiers, bulky coils, and resistors, leading to increased size, manufacturing costs, and limited practical application due to the need for precision comparators and high-speed ADCs.

Innovation Solution

A current measurement apparatus using a capacitor connected in parallel to the device under test, with a test pattern generation module, an input/output buffer, a time measurer, and a controller to measure current by charging or discharging the capacitor, eliminating the need for precision parts and allowing for miniaturization.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional current measurement tools use precision amplifiers, coils, and resistors, then measurement precision is improved, but device complexity and manufacturing cost increase

Engineering Contradiction:
Improvecurrent measurement precisionVSAvoidapparatus complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent extracts the essential measurement function from complex precision instruments by using only a capacitor and timing circuit. Instead of using precision amplifiers, coils, and resistors, the invention isolates the core measurement principle (current charging a capacitor) and implements it with minimal components, thereby reducing device complexity while maintaining measurement capability

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the measurement parameter from direct voltage/current measurement to time measurement. By measuring the time required to charge a capacitor through the unknown current and converting this time measurement to current value, the system achieves measurement precision without requiring precision analog components, thus reducing device complexity

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If conventional current measurement tools use precision amplifiers and coils, then measurement precision is improved, but manufacturing cost increases

Engineering Contradiction:
Improvecurrent measurement precisionVSAvoidmanufacturing cost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent replaces expensive, delicate precision instruments with inexpensive, robust components. The capacitor and timing circuit used in the invention are significantly cheaper than precision amplifiers and coils, making the device economically viable for practical applications while maintaining adequate measurement precision for semiconductor testing

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The patent substitutes complex analog measurement systems with a simpler digital timing system. Instead of using precision analog components (amplifiers, coils, resistors), the invention uses a digital timer to measure capacitor charging time, which is then converted to current value. This substitution dramatically reduces manufacturing cost while maintaining measurement capability

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If conventional current measurement tools use coils and resistors, then measurement precision is improved, but device size increases

Engineering Contradiction:
Improvecurrent measurement precisionVSAvoidapparatus size
Core Design Contradiction:
Measurement precisionVSVolume of moving object

Solution Approach 1:

The patent extracts only the essential measurement function from bulky traditional instruments. By removing coils and resistors and using only a small capacitor and integrated timing circuit, the invention achieves the same measurement purpose in a compact form factor suitable for modern semiconductor testing environments

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent merges the measurement and control functions into a single integrated timing circuit. The capacitor charging process and time measurement are combined in one compact unit, eliminating the need for separate precision instruments and significantly reducing the overall device volume

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution reduces unit costs, enables miniaturization, and allows for current measurement without modifying the device under test, providing a cost-effective and compact solution for current measurement in electronic and semiconductor devices.

Implementation Method 1

a capacitor (210) connected in parallel to a signal terminal of a device under test (100)

Methodology Applied
Scientific EffectCapacitance: Capacitance

Implementation Method 2

an input/output (I/O) buffer (232) configured to increase or decrease an amount of charges of the capacitor (210) through charging or discharging the capacitor (210)

Methodology Applied
Scientific EffectElectrical charge transfer: Conduction (electrical)

Implementation Method 3

a time measurer (234) configured to measure an arrival time which is a time during which a voltage of one end of the capacitor (210) reaches a predetermined second voltage from a predetermined first voltage

Methodology Applied
Scientific EffectVoltage threshold detection: Electric Field

Data Source

PatentUS11255886B2Current measurement apparatus including charge/discharge means and current measurement method using same
Publication Date: 2022.02.22 PHOSPHIL INC
  • US11255886B2 patent drawing
  • US11255886B2 patent drawing
  • US11255886B2 patent drawing

AI summary

A current measurement apparatus comprises: a capacitor connected in parallel to a signal terminal of a device under test (DUT); a test pattern generation apparatus generating a test pattern to operate the DUT; and a measurement module connected to one end of the capacitor. The measurement module comprises: an input/output (I/O) buffer increasing or reducing an amount of charges of the capacitor and outputting a signal corresponding to an output logic value according to a voltage of the one end of the capacitor; a time measurer measuring an arrival time which it takes for the voltage of the one end of the capacitor to reach a second voltage from a first voltage; and a controller controlling the i/o buffer and the time measurer to measure the arrival time and controlling such that a value of a current related to an inspection of a DUT is measured using the arrival time.