Capacitor Electrode Layout for Higher Breakdown Voltage
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The breakdown voltage of capacitors is limited due to the existing configurations of electrodes and dielectric films, which affects their performance in high-frequency applications.
Innovation Solution
A capacitor design featuring a substrate with a first electrode, a dielectric film, a second electrode positioned inside the first electrode's periphery, and a third electrode in contact with the second electrode but separated from the dielectric film, along with a protective film covering both, where the third electrode includes a seed layer and plating layer, and an unnecessary layer is removed using ion or atom irradiation to enhance breakdown voltage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the third electrode is formed in contact with the second electrode to improve adhesion and reduce peeling, then the reliability of the capacitor is improved, but the breakdown voltage is reduced due to the proximity to the dielectric film
Solution Approach 1:
The third electrode is designed to extend in the vertical dimension (upward from the second electrode) rather than only in the horizontal plane. This vertical extension allows the third electrode to be separated from the dielectric film while maintaining contact with the second electrode, thus improving breakdown voltage while preserving adhesion reliability through the protective film contact.
Solution Approach 2:
The third electrode is segmented into multiple regions: a first region in contact with the second electrode, a second region separated from the dielectric film, and a third region that contacts the protective film. This segmentation allows each region to fulfill different functions - electrical connection, insulation, and adhesion enhancement - simultaneously resolving the contradiction between reliability and breakdown voltage.
2Reliability
If ion or atom irradiation is used to remove the unnecessary layer on the third electrode, then the adhesion between the third electrode and protective film is enhanced, but the dielectric film may be damaged if not properly controlled
Solution Approach 1:
The ion or atom irradiation is applied selectively only to the upper surface of the third electrode where the unnecessary layer exists, while the dielectric film is protected from irradiation. This localized treatment enhances adhesion at the electrode-protective film interface without damaging the dielectric film, resolving the contradiction between reliability improvement and harmful effects.
Solution Approach 2:
The unnecessary layer is removed from the third electrode before forming the protective film. This preliminary action ensures that the protective film forms directly on the cleaned electrode surface, maximizing adhesion. The timing of this removal step, combined with selective irradiation, prevents dielectric film damage while achieving the desired adhesion enhancement.
3Manufacturing precision
If the outer periphery of the third electrode is positioned inside the outer periphery of the first electrode to improve manufacturing precision, then the manufacturing precision is improved, but the area for electrical connection is reduced
Solution Approach 1:
The third electrode utilizes the vertical dimension to extend upward from the second electrode, creating additional surface area for electrical connection and protective film contact without increasing the horizontal footprint. This dimensional extension allows the electrode to remain within the first electrode's periphery while providing sufficient connection area, resolving the contradiction between manufacturing precision and connection area.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration improves the breakdown voltage by optimizing the distance and positioning of electrodes and dielectric films, reducing damage to the dielectric film and enhancing the adhesion between the third electrode and the protective film, thereby improving the capacitor's performance.
Implementation Method 1
removing an unnecessary layer formed on an upper surface of the third electrode
Implementation Method 2
removing an unnecessary layer formed on an upper surface of the third electrode in a state where an upper surface of the dielectric film outside the outer periphery of the second electrode in the plan view is exposed
Data Source
AI summary
A capacitor includes a substrate, a first electrode provided on the substrate, a dielectric film provided on the first electrode, a second electrode provided on the dielectric film and having an outer periphery positioned inside the outer periphery of the first electrode in a plan view viewed from above in a direction normal to an upper surface of the substrate, a third electrode that is in contact with the second electrode in a region inside the second electrode in the plan view, is separated upward from the first electrode and the dielectric film outside the region in the plan view, and has an outer periphery positioned inside the outer periphery of the first electrode and an outer periphery of the dielectric film in the plan view, and a protective film covering the second electrode and the third electrode and being in contact with the second electrode and the third electrode.