Multilayer Capacitor Groove Aspect Ratio Modulation for Contact Formation
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Solution Overview
Problem
The challenge in semiconductor integrated circuits is the difficulty in forming contacts due to the thinness of deposited films in grooved multilayer capacitors, which limits electrode extraction.
Innovation Solution
A multilayer capacitive element design featuring a substrate with groove modulation structures that alter the aspect ratio, allowing for easier electrode extraction by changing the geometric boundary and aspect ratios within the groove, enabling more effective stacking and connection of conductive and dielectric layers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If deposited films are made thinner to achieve continuous miniaturization, then the capacitor size is reduced, but the difficulty of forming contacts during electrode extraction increases
Solution Approach 1:
The patent introduces aspect ratio modulation structures that create regions with different aspect ratios within the groove. By modulating the groove geometry in the vertical dimension (creating shallow and deep regions), the patent enables better electrode extraction in the horizontal dimension while maintaining overall miniaturization. The modulation structures create dimensional variation that resolves the contact formation difficulty without increasing overall capacitor volume.
Solution Approach 2:
The patent applies local quality by creating specific modulation structures at particular locations within the groove. The aspect ratio modulation structures are strategically positioned to create local regions with favorable aspect ratios for electrode extraction, while other regions maintain the miniaturized structure. This localized modification allows contact formation in specific areas without compromising the overall small size of the capacitor.
2Quantity of substance
If the groove aspect ratio is increased to fit more layers, then the capacitance density is improved, but the electrode extraction becomes more difficult
Solution Approach 1:
The patent segments the groove into multiple regions with different aspect ratios using modulation structures. Instead of having a single uniform high aspect ratio groove, the groove is divided into shallow regions and deep regions. This segmentation allows certain regions to have high aspect ratios for increased capacitance density while other regions have lower aspect ratios that facilitate electrode extraction, thus resolving the contradiction between capacitance density and ease of extraction.
Solution Approach 2:
The patent changes the aspect ratio parameter locally within the groove by introducing modulation structures. The aspect ratio is not kept constant but is varied spatially to create regions with different characteristics. This parameter change allows the system to achieve high capacitance density in deep regions while maintaining ease of electrode extraction in shallow regions, effectively resolving the contradiction between these two requirements.
3Area of stationary object
If modulation structures are added to change aspect ratio, then the electrode extraction area is increased, but the device complexity increases
Solution Approach 1:
The aspect ratio modulation structures serve multiple functions simultaneously: they modify the groove geometry to create favorable extraction areas, they define regions for different aspect ratios, and they integrate with the existing capacitor structure. By making these structures multi-functional, the patent increases extraction area without adding separate dedicated components, thus minimizing the increase in device complexity while achieving the desired effect.
Data Source
AI summary
A multilayer capacitive element and a design method of the same are provided. The capacitive element includes a substrate having a groove, a first aspect ratio modulation structure, and a plurality of conductive layers and a plurality of dielectric layers. The first aspect ratio modulation structure is located in the groove to define the groove as a first region and a first modulation region, wherein an aspect ratio of the first modulation region is different from that of the first region. The plurality of conductive layers and the plurality of dielectric layers are alternately stacked in the groove.