Capacitor-Based Temperature Sensor for Low Power Semiconductor Monitoring
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Solution Overview
Problem
Conventional temperature sensors in semiconductor devices face issues such as high power consumption, heat generation, size constraints, and the need for extensive calibration due to process deviations, making them impractical for integration with semiconductor dies and requiring efficient alternatives for temperature monitoring.
Innovation Solution
A capacitor-based temperature sensor utilizing a switched capacitor circuit that generates a noise voltage proportional to absolute temperature, with amplification and noise reduction techniques to produce a relative temperature output signal, simplifying calibration and reducing die-to-die sensitivity deviations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional temperature sensors are used, then temperature monitoring is achieved, but power consumption is excessive
Solution Approach 1:
The patent replaces conventional mechanical/electrical temperature sensing mechanisms with a noise-based measurement approach. The temperature sensor measures temperature through noise voltage generated by resistive elements, eliminating the need for power-intensive heating elements or complex signal processing circuits while maintaining measurement capability.
2Measurement precision
If conventional temperature sensors are used, then temperature monitoring is achieved, but significant heat is generated
Solution Approach 1:
The patent converts the harmful thermal noise, which is normally considered interference, into the useful measurement signal. By measuring the noise voltage generated by resistive elements, the system directly obtains temperature information without requiring additional power dissipation or heat-generating components.
3Measurement precision
If conventional temperature sensors are used, then temperature monitoring is achieved, but device size is large
Solution Approach 1:
The patent integrates the temperature sensing function into existing resistive elements and noise measurement circuits that are already present in the semiconductor device. This multi-functional approach eliminates the need for separate dedicated temperature sensor structures, significantly reducing the area required for temperature monitoring.
4Measurement precision
If P-N junction temperature sensors are used, then high temperature sensitivity is achieved, but extensive calibration is required
Solution Approach 1:
The patent changes the measurement parameter from P-N junction characteristics to noise voltage spectral density. This parameter change eliminates sensitivity to process deviations in junction formation while maintaining temperature sensitivity, as noise voltage is fundamentally related to temperature through thermal agitation of charge carriers rather than being dependent on specific device geometry or material properties.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The capacitor-based temperature sensor is highly reproducible, reduces power consumption, and simplifies calibration, enabling effective temperature monitoring while being compact enough for integration with semiconductor dies, addressing the limitations of conventional sensors.
Implementation Method 1
a capacitor-based temperature sensor that provides a reduction in deviation occurring in die-to-die sensor sensitivity... generates a noise voltage proportional to absolute temperature
Data Source
AI summary
A temperature sensor and device and system including same, comprise a switched capacitor circuit configured to generate a noise voltage in response to switching and circuitry configured to generate a relative temperature output signal proportional to an absolute temperature output signal in response to the noise voltage. The device includes a temperature sensor, temperature sensitive device logic and temperature compensation logic configured to receive the absolute temperature and generate an adjustment signal to adapt the temperature sensitive device logic in response thereto. A related method for sensing temperature includes amplifying a noise voltage from a switched capacitor circuit in a plurality of parallel amplifier channels and removing amplifier noise from each of the plurality of parallel amplifier channels to form a relative output signal proportional to an absolute temperature.