Capillary Lens Beam Scanning for Semiconductor Inspection
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Solution Overview
Problem
The increasing integration of semiconductor devices makes it difficult to stimulate the inside of the chip for failure analysis, as X-ray sources are heavy and difficult to move at high speeds, and scanning with X-ray beams is challenging due to numerous terminals and wirings.
Innovation Solution
A radiation beam scanning optical system using capillary lenses to render and condense radiation beams, with a drive unit and control unit to maintain optical axis parallelism, allowing scanning without moving the radiation source or object, and incorporating shielding members to manage beam direction and intensity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the radiation source is moved to scan the radiation beam, then the scanning function is achieved, but the system becomes difficult to operate at high speed due to the heavy weight of the radiation source
Solution Approach 1:
Instead of moving the radiation source to achieve beam scanning, the patent inverts the approach by moving the second capillary lens while keeping the radiation source stationary. This allows the radiation beam to be scanned across the object by changing the position of the condensing lens, thereby achieving high-speed scanning without the limitations of moving a heavy radiation source.
Solution Approach 2:
The patent introduces capillary lenses as intermediary optical elements between the radiation source and the object. The first capillary lens renders the radiation beam parallel, and the second capillary lens condenses it on the object. By moving the second capillary lens, the radiation beam scanning is achieved without directly moving the radiation source, thus overcoming the weight and speed limitations.
2Speed
If the semiconductor device is moved to scan the radiation beam, then the scanning function is achieved, but the device complexity increases due to numerous terminals and wirings
Solution Approach 1:
Instead of moving the semiconductor device (object) to achieve scanning, the patent inverts the approach by moving the second capillary lens. This keeps the semiconductor device stationary, avoiding the complexity of handling numerous terminals and wirings that would be required to move the device at high speed.
Solution Approach 2:
The patent replaces the mechanical approach of moving the entire semiconductor device with an optical approach using movable capillary lenses. This substitution allows scanning to be achieved by moving only the optical elements rather than the complex device under test, thereby reducing mechanical complexity.
3Measurement precision
If the radiation beam is condensed on the object with high accuracy, then the inspection precision is improved, but the system becomes more complex due to additional optical components
Solution Approach 1:
The patent introduces capillary lenses as intermediary optical elements to achieve precise beam condensing. The first capillary lens renders the radiation beam parallel, and the second capillary lens condenses it on the object with high accuracy. These intermediary elements enable precise inspection without requiring direct movement of the radiation source or object.
Solution Approach 2:
The patent segments the optical system into distinct functional components: a first capillary lens for parallelizing the beam and a second capillary lens for condensing it. This segmentation allows each component to be optimized for its specific function, achieving high condensing accuracy while maintaining manageable system complexity through modular design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise scanning and inspection of semiconductor devices without moving the radiation source or object, enhancing condensing accuracy and efficiency, and allowing for high-accuracy failure detection.
Implementation Method 1
a first capillary lens configured to render the radiation beam output from the radiation source into parallel light
Implementation Method 2
a second capillary lens configured to condense the radiation beam having passed through the first capillary lens on the object
Data Source
Figure 1
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AI summary
An X-ray beam scanning optical system 10 includes an X-ray source 11 that outputs an X-ray beam R1 toward a semiconductor device 100, a first capillary lens 12 that renders the X-ray beam R1 output from the X-ray source 11 into an X-ray beam R2 that is parallel X-rays, a second capillary lens 13 that condenses the X-ray beam R2 having passed through the first capillary lens 12 on the semiconductor device 100, and a shielding member 14 disposed between the X-ray source 11 and the semiconductor device 100. Further, the inspection apparatus 1 includes a drive unit (here, shielding member 14) that moves the second capillary lens 13, and the drive control unit 15 that controls the shielding member 14 so as to move the second capillary lens 13 such that the X-ray beam condensed on the semiconductor device 100 is scanned while a state where the optical axis at the emission end 12b of the first capillary lens 12 and the optical axis at the incident end 13a of the second capillary lens 13 are parallel is maintained.