Capillary Nozzle Support Structure for EUV Vibration Stability
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Solution Overview
Problem
Existing nozzle apparatuses in EUV light sources suffer from unintentional vibrations of capillary tubes, leading to pointing instability and reduced or no plasma production, which affects the generation of extreme ultraviolet light.
Innovation Solution
A nozzle apparatus with a support structure that includes a first and second support portion, coupled with an electro-mechanical actuator, to control intentional vibrations and reduce or eliminate unintentional vibrations of the capillary tube, ensuring precise targeting and efficient EUV light generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the capillary tube is made flexible to allow intentional vibrations for target material delivery, then the ability to generate plasma and EUV light is improved, but unintentional vibrations occur causing pointing instability
Solution Approach 1:
The support structure is divided into multiple segments including a first support portion attached to the body and a second support portion that contacts the capillary tube. This segmentation allows each portion to perform its specific function: the first support portion provides structural anchoring while the second support portion provides vibration damping, thereby resolving the contradiction between flexibility for plasma generation and stability for pointing accuracy
Solution Approach 2:
The second support portion acts as an intermediary element between the capillary tube and the external environment. It mechanically couples to the capillary tube to provide intentional vibrations for target material delivery while simultaneously damping unintentional vibrations, thus mediating between the need for flexibility and the need for stability
2Reliability
If the capillary tube is rigid to maintain pointing stability, then pointing instability is reduced, but intentional vibrations for target material delivery are compromised
Solution Approach 1:
The capillary tube system exhibits different mechanical properties at different locations: the tube itself maintains flexibility for vibration generation, while the second support portion provides localized vibration damping. This local differentiation of mechanical properties allows the system to simultaneously achieve both intentional vibration capability and unintentional vibration suppression
3Reliability
If the support structure is added to reduce unintentional vibrations, then pointing stability is improved, but device complexity increases
Solution Approach 1:
The vibration damping function is extracted as a separate, dedicated component (the second support portion) rather than attempting to achieve it through complex control systems or modifying the entire capillary tube structure. This extraction simplifies the overall design by isolating the vibration control function to a specific, manageable component
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus stabilizes the capillary tube, maintaining precise targeting and enhancing EUV light production by reducing unwanted vibrations, thereby improving the efficiency and reliability of the EUV light source.
Implementation Method 1
an electro-mechanical actuator in contact with the tube and configured to impart mechanical motion into the tube
Implementation Method 2
the target material emits extreme ultraviolet (EUV) light when in a plasma state
Data Source
AI summary
An apparatus includes: a tube; a body including: a first body wall and a second body wall; and a support structure including: a first support portion and a second support portion. The first body wall extends in a first direction, the second body wall extends in a second direction that is different than the first direction, a first portion of the tube passes through an opening in the second body wall the first support portion is configured to attach to the first body wall, and a second portion of the tube is configured to pass through the second support portion when the first support portion is attached to the first body wall. An interior of the tube and an interior of the body are configured to receive molten target material, and the target material emits extreme ultraviolet (EUV) light when in a plasma state.