Flexible Capillary Tubes for Vibration Isolation in Vacuum Pump Gas Supply
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Solution Overview
Problem
Existing vacuum pumping systems in semiconductor tools face issues with corrosion and degradation due to reactive gases, and the use of rigid pipes for gas supply leads to vibration transfer and increased costs, especially when accommodating different pumping mechanisms.
Innovation Solution
The use of flexible capillary tubes to convey purge gas to purge ports within the pumping arrangement, allowing for customizable flow rates and vibration isolation, replacing the need for variable flow restrictors and rigid pipes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If rigid pipes are used to convey purge gas, then the gas supply system is structurally stable, but vibrations from the pumping arrangement are transferred to the gas supply system
Solution Approach 1:
The patent replaces rigid pipes with flexible capillary tubes to convey purge gas. The flexible nature of these tubes isolates them from vibrations generated by the pumping arrangement, preventing vibration transfer to the gas supply system while maintaining structural integrity and gas delivery functionality.
2Ease of operation
If variable flow restrictors are used to adjust purge gas flow rates, then the flow rate can be customized, but the system complexity and cost increase
Solution Approach 1:
The patent uses capillary tubes with different internal diameters and lengths to provide customized purge gas flow rates. By varying these geometric parameters during manufacturing, the system achieves flow rate adjustability without requiring complex variable flow restrictors or solenoid valves, thereby reducing system complexity and cost.
3Adaptability or versatility
If bespoke rigid pipes are provided for each pumping arrangement, then the gas supply can be precisely tailored, but the cost significantly increases
Solution Approach 1:
The patent employs flexible capillary tubes that can be used across multiple different pumping arrangements. The flexibility and pre-defined flow characteristics of these tubes allow a single universal gas supply system to adapt to various pump configurations without requiring custom-made rigid pipes for each application, significantly reducing manufacturing costs.
4Manufacturing precision
If multiple solenoid valves and flow restrictors are installed in the manifold, then precise flow control is achieved, but the manufacturing precision requirements become extremely high
Solution Approach 1:
The patent achieves precise flow control by manufacturing capillary tubes with specific internal diameters and lengths. These geometric parameters are determined during the tube manufacturing process itself, eliminating the need for complex assemblies of solenoid valves and flow restrictors. This approach maintains high flow control precision while significantly simplifying the manufacturing process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution simplifies installation, reduces costs, and effectively isolates vibrations, enabling a single kit of flexible tubes to be used across various pumping arrangements without the need for bespoke pipes, while maintaining the integrity of pump components and sensors.
Implementation Method 1
conveying purge gas to a port of the pumping arrangement using a flexible capillary tube
Implementation Method 2
These connecting pipes can undesirably transfer vibrations from the pumping arrangement to the gas supply system
Data Source
AI summary
A system (100) for supplying an inert purge gas to a pumping arrangement (106) includes a plurality of flexible capillary tubes (102) each for conveying the gas from a respective outlet of a manifold (12) to a respective port (104) of the pumping arrangement (106). The internal diameter and length of each tube (102) control the gas flow rate to the respective port (104).