Captive Spring Hook Faceplate Mounting for Lower Electrostatic Stress

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Solution Overview

Problem

Traditional methods of securing a faceplate to an ion source in semiconductor fabrication create regions of high electrostatic stress, leading to a risk of arcing with nearby components.

Innovation Solution

A faceplate with elongated channels and internal cavities, secured by fasteners with bent portions that are rotated into place, reducing electrostatic stress through increased curvature and tension systems.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If traditional fastening methods are used to secure the faceplate to the arc chamber, then the faceplate is firmly attached, but regions of high electrostatic stress are created which may cause arcing to nearby components

Engineering Contradiction:

Improveattachment strengthVSAvoidelectrostatic stress

Core Design Contradiction:

StrengthVSObject-affected harmful factors

Solution Approach 1:

The patent applies curvature by designing the fastener with a bent portion (hook shape) and configuring the channel with rounded transitions. This curvature distributes electrostatic stress more evenly compared to sharp corners, reducing the risk of arcing while maintaining secure attachment of the faceplate to the arc chamber.

Inventive Principle:

Principle #14Spheroidality (Curvature)

2Object-affected harmful factors

If the fastener is designed with a bent portion that requires rotation to secure, then electrostatic stress is reduced, but the installation process becomes more complex

Engineering Contradiction:

Improveelectrostatic stressVSAvoidinstallation ease

Core Design Contradiction:

Object-affected harmful factorsVSEase of operation

Solution Approach 1:

The fastener features an asymmetric bent portion that must be inserted in a specific orientation and then rotated to engage properly. This asymmetric design ensures correct installation while reducing electrostatic stress, though it does require the installer to follow a specific sequence (insert then rotate) rather than a simple straight-in installation.

Inventive Principle:

Principle #4Asymmetry

3Ease of operation

If the channel is designed with elongated shape and internal cavity, then the bent fastener can be properly installed and secured, but the faceplate design becomes more complex

Engineering Contradiction:

Improvefastener installationVSAvoidfaceplate structure

Core Design Contradiction:

Ease of operationVSDevice complexity

Solution Approach 1:

The fastener's bent portion is nested within the internal cavity of the channel during installation. The channel is configured with an opening that allows the bent fastener to be inserted, and the internal cavity provides space for the bent portion to engage and lock the fastener in place, creating a secure attachment while managing the structural complexity.

Inventive Principle:

Principle #7Nested doll (Nesting)

Data Source

PatentUS20250343022A1Captive spring hooks for reduced electrostatic stress

Publication Date: 2025.11.06 APPLIED MATERIALS INC

AI summary

A faceplate and fasteners for attaching the faceplate to an ion source are disclosed. The faceplate includes a plurality of channels that open to the side of the faceplate. These channels are an elongated shape such that the channels are larger in one direction than in the orthogonal direction. The channels each terminate in an internal cavity, which has a larger size than the channels. The fasteners may be rods that are shaped such that the proximal ends of the fastener have a bent portion, which can only enter the channel when properly oriented. Once the bent portion is passed through the channel and extends into the internal cavity, the fastener can be rotated so as to secure it in place.