Carbon Diffusion Barrier Coating for Hydrogen-Resistant CNT EUV Pellicles

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Solution Overview

Problem

Carbon nanotube (CNT) pellicles in EUV lithography are susceptible to damage from hydrogen plasma, leading to reduced lifespan due to crystalline defects on their surfaces, which compromises the effectiveness of the pellicle membrane in protecting photomasks from particle contaminants.

Innovation Solution

A protective coating comprising transition metal-containing nanostructures on CNT surfaces, encapsulated by a carbon-based diffusion barrier layer and a conformal capping layer, is applied to the CNTs to prevent damage from hydrogen radicals and extend the pellicle membrane's lifespan.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If CNT pellicle membrane is used for EUV lithography, then high transparency and mechanical stability are achieved, but the membrane is damaged by hydrogen plasma leading to reduced lifespan

Engineering Contradiction:

Improvepellicle membrane lifespanVSAvoidhydrogen plasma damage

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

A protective coating comprising transition metal-containing nanostructures, carbon-based diffusion barrier layer, and conformal capping layer is applied as an intermediary between the hydrogen plasma and CNT surfaces. This coating acts as a mediator that absorbs and dissipates plasma energy, preventing direct damage to the CNT crystalline structure while maintaining the pellicle's transparency and mechanical properties

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The protective coating is constructed as a composite material system with multiple functional layers: transition metal-containing nanostructures for plasma absorption, carbon-based diffusion barrier layer for structural protection, and conformal capping layer for surface passivation. This composite structure synergistically addresses hydrogen plasma damage while preserving the underlying CNT pellicle membrane's optical and mechanical characteristics

Inventive Principle:

Principle #40Composite materials

2Reliability

If protective coating is applied to CNT surfaces, then durability against hydrogen plasma is improved, but device complexity increases

Engineering Contradiction:

Improvepellicle membrane durabilityVSAvoidcoating structure complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The protective coating is segmented into three distinct functional layers with specific roles: transition metal-containing nanostructures for plasma energy absorption, carbon-based diffusion barrier layer for structural integrity, and conformal capping layer for surface protection. This segmentation allows each layer to be optimized independently for its specific function while collectively providing comprehensive protection

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The coating design utilizes parameter changes at the nanoscale, including controlling nanostructure size, layer thickness, and material composition ratios. By optimizing these parameters, the coating provides maximum protection against hydrogen plasma while maintaining EUV light transmission and mechanical stability, thereby managing complexity through precise parameter control rather than structural simplification

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The protective coating enhances the durability and longevity of the CNT pellicle membrane by mitigating hydrogen plasma damage, maintaining high transparency and mechanical stability, thereby improving the reliability of EUV lithography processes.

Implementation Method 1

a carbon-based diffusion barrier layer over at least the plurality of first nanostructures

Methodology Applied

Scientific EffectDiffusion barrier: Diffusion Barrier

Implementation Method 2

susceptible to damage from hydrogen plasma

Methodology Applied

Scientific EffectPlasma: Plasma

Implementation Method 3

mitigating hydrogen plasma damage

Methodology Applied

Scientific EffectEnergy absorption: Absorption (EM radiation)

Data Source

PatentUS20250216770A1Carbon-containing diffusion barrier layer for protection of CNT EUV pellicle

Publication Date: 2025.07.03 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

A pellicle including a pellicle membrane with improved stability to hydrogen plasma is provided. The pellicle membrane includes a plurality of carbon nanotubes (CNTs), where at least one carbon nanotube (CNT) of the plurality of CNTs is coated by a protection coating. The protection coating includes a plurality of nanostructures that includes a transition metal or an oxide, nitride, silicide or carbide thereof on a surface of the at least one CNT of the plurality of CNTs, a carbon-based diffusion barrier layer over at least the plurality of nanostructures, and a capping layer over at least the carbon-based diffusion barrier layer. The pellicle further includes a pellicle border attached to the pellicle membrane along a peripheral region of the pellicle membrane and a pellicle frame attached to the pellicle border.