Carbon-Based Bulk Acoustic Wave Resonator for Stable RF Frequency

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Solution Overview

Problem

Existing bulk acoustic wave resonators face challenges in achieving high acoustic wave propagation speed, low electric resistance, and stable heat characteristics, especially when ambient temperature changes, which affect their performance in wireless communication devices.

Innovation Solution

The use of carbon-based materials, such as carbon nanotubes and graphene, for the electrodes and temperature coefficient of frequency (TCF) compensation layers in bulk acoustic wave resonators, which improve acoustic wave reflection characteristics and reduce temperature-related frequency variance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If traditional metal electrodes are used in bulk acoustic wave resonators, then electrical conductivity is achieved, but acoustic wave propagation speed is limited and temperature stability is poor

Engineering Contradiction:
Improveacoustic wave propagation speedVSAvoidtemperature stability
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The patent changes the material parameters of the electrodes from traditional metals to carbon-based materials (carbon nanotubes, graphene). These carbon-based materials have fundamentally different physical parameters including higher acoustic wave propagation speed and near-zero temperature coefficient of frequency, thereby resolving the contradiction between speed and temperature stability

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite material structures where carbon-based materials are integrated with piezoelectric layers to form the resonator. The carbon-based electrodes combine electrical conductivity with superior acoustic properties and thermal stability, achieving both high speed and reliability simultaneously

Inventive Principle:
Principle #40Composite materials

2Speed

If carbon-based materials are used for electrodes, then acoustic wave propagation speed increases, but manufacturing complexity increases

Engineering Contradiction:
Improveacoustic wave propagation speedVSAvoidmanufacturing complexity
Core Design Contradiction:
SpeedVSEase of manufacture

Solution Approach 1:

The patent replaces traditional mechanical sputtering or evaporation processes for metal electrode deposition with chemical vapor deposition (CVD) methods for growing carbon-based materials. This substitution enables better control over material properties and simplifies the manufacturing process for carbon-based electrodes

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

By changing the deposition method parameters (using CVD instead of physical vapor deposition) and controlling growth conditions (temperature, pressure, gas composition), the patent achieves manufacturable processes for carbon-based electrodes while maintaining their superior acoustic properties

Inventive Principle:
Principle #35Parameter changes

3Use of energy by moving object

If conventional electrodes are used, then device structure is simple, but electric resistance is high and power efficiency is low

Engineering Contradiction:
Improvepower efficiencyVSAvoiddevice structure
Core Design Contradiction:
Use of energy by moving objectVSDevice complexity

Solution Approach 1:

The patent changes the electrical conductivity parameter of the electrodes by using carbon-based materials with inherently lower resistivity. This material parameter change directly improves power efficiency by reducing ohmic losses in the electrode structures

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses thin-film carbon-based electrode structures that can be deposited in ultra-thin layers while maintaining low resistance. These thin-film electrodes reduce material usage and simplify the overall device structure compared to traditional thick metal electrode layers

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the resonator's acoustic wave propagation speed, reduces electric resistance, and stabilizes heat characteristics, leading to improved performance and reliability in wireless communication devices by maintaining a near-zero temperature coefficient of frequency.

Implementation Method 1

improve acoustic wave reflection characteristics

Methodology Applied
Scientific EffectAcoustic wave reflection: Reflection

Implementation Method 2

In response to a high frequency signal being applied to the electrodes, the piezoelectric layer oscillates

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentEP2789099B1Bulk acoustic wave resonator and manufacturing method thereof, and radio frequency device using bulk acoustic wave resonator
Publication Date: 2021.07.07 SAMSUNG ELECTRONICS CO LTD
  • EP2789099B1 patent drawingFigure 1~2
  • EP2789099B1 patent drawingFigure 3~6
  • EP2789099B1 patent drawingFigure 7~9

AI summary

Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include a first electrode, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer. In various aspects, at least one of the first electrode, the piezoelectric layer, and the second electrode are formed of a carbon-based material.