Carbon Nano-Material Coated Probe for High-Frequency IC Testing
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Solution Overview
Problem
Current wafer packaging and testing technologies face challenges with high-frequency ICs due to increased resistance and adhesion issues between metal probes and solder balls, leading to reduced accuracy and shorter probe service life.
Innovation Solution
A coated probe with a carbon nano-material or metal nitride layer, combined with a hydrophobic layer, is developed to enhance conductivity and mechanical strength, reducing adhesion and wear, and improving test reliability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If a metal probe is used for high-frequency IC testing, then the test frequency can be increased, but the resistance increases and accuracy decreases
Solution Approach 1:
The patent applies composite materials by coating the metal probe with a carbon nanotube layer. This creates a hybrid structure combining the electrical conductivity of metal with the low resistance and high frequency characteristics of carbon nanotubes. The carbon nanotube coating forms a conductive network on the probe surface, reducing overall resistance while maintaining mechanical strength, thereby enabling accurate high-frequency IC testing without the resistance penalties of pure metal probes
Solution Approach 2:
The patent changes the surface properties of the probe by introducing a carbon nanotube coating layer with specific physical and electrical parameters. This coating modifies the electrical resistance, surface roughness, and contact properties of the probe, allowing it to operate effectively at higher frequencies while maintaining measurement accuracy through optimized electrical characteristics
2Reliability
If a metal probe is used for testing, then conductivity is maintained, but adhesion occurs with solder balls reducing conductivity
Solution Approach 1:
The patent applies local quality by creating a carbon nanotube coating only on the contact surface of the probe tip. This localized treatment modifies the surface properties specifically at the contact point to reduce adhesion with solder balls, while the bulk metal probe body maintains its inherent conductivity. The carbon nanotube layer acts as a non-stick surface that prevents solder ball adhesion while preserving electrical conduction through the coating's conductive network
3Productivity
If a metal probe is used for high-frequency testing, then testing capability is enabled, but wear of the probe tip increases reducing service life
Solution Approach 1:
The patent uses composite materials to create a probe with enhanced wear resistance. The carbon nanotube coating forms a hard, durable layer on the probe tip that is highly resistant to mechanical wear. This composite structure combines the toughness of the metal substrate with the hardness and wear resistance of the carbon nanotube overlay, enabling the probe to withstand repeated high-frequency contact operations without significant tip degradation, thereby extending service life while maintaining testing capability
Solution Approach 2:
The carbon nanotube coating acts as a thin film layer that protects the underlying metal probe tip. This film provides a wear-resistant barrier that reduces mechanical degradation during repeated contact operations. The nanotube structure creates a resilient surface that can withstand friction and contact wear, preserving the probe tip geometry and electrical properties over extended service periods
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The coated probe achieves improved conductivity, reduced adhesion, and extended service life, enhancing the accuracy and reliability of IC testing while minimizing costs in the semiconductor industry.
Implementation Method 1
A carbon nano-material is modified such that the surface of the carbon nano-material contains a —COOH group
Implementation Method 2
The carbon nano-material containing a —COOH group on the surface thereof is reacted with a thiol, such that the surface of the carbon nano-material contains a mercapto group (—SH)
Implementation Method 3
The terminal of the probe body is placed and reacted in a solution of the carbon nano-material containing a —SH group on the surface thereof, so as to form a carbon nano-material layer on the surface of the terminal of the probe body
Implementation Method 4
A carbon nano-material is deposited on the surface of the terminal with vapor deposition to form a carbon nano-material layer on the surface of the terminal of the probe body
Implementation Method 5
A metal nitride compound is deposited on the surface of the terminal with vapor deposition to form a metal nitride layer on the surface of the terminal of the probe body
Data Source
AI summary
A coated probe is provided. The probe includes a probe body and a cladding layer. The probe body has a terminal. The cladding layer covers the surface of the terminal of the probe body, wherein the cladding layer includes a carbon nano-material layer, and the carbon nano-material layer includes a carbon nano-material.