Carbon dioxide reusing system and method
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Solution Overview
Problem
Conventional semiconductor processes face issues with carbon dioxide reuse due to insufficient purity control, leading to potential defects and facility shutdowns when impure carbon dioxide is supplied to the process apparatus.
Innovation Solution
A carbon dioxide reusing system with a blocking device that determines purity and prevents the supply of carbon dioxide that does not meet predefined references, utilizing multiple purifiers and analyzers to ensure high-purity carbon dioxide is supplied to the process apparatus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If carbon dioxide is reused from exhaust gas without strict purity control, then productivity is improved by continuing operation, but manufacturing precision deteriorates due to defects from impure carbon dioxide
Solution Approach 1:
The system implements a feedback mechanism where the blocking device continuously monitors the purity of reused carbon dioxide and automatically blocks supply when purity falls below the reference level, ensuring product quality while maintaining continuous operation through automated control
Solution Approach 2:
The blocking device performs preliminary purity assessment of reused carbon dioxide before it is supplied to the process apparatus, preventing impure gas from causing defects while allowing continuous operation with pure gas supply
2Manufacturing precision
If purity control mechanisms are implemented for reused carbon dioxide, then manufacturing precision is improved by preventing defects, but device complexity increases due to additional blocking and monitoring devices
Solution Approach 1:
The blocking device is extracted as a separate, dedicated component that performs purity monitoring and blocking functions independently, simplifying the overall system structure while ensuring product quality through specialized functionality
Solution Approach 2:
The blocking device acts as an intermediary between the carbon dioxide supply system and the process apparatus, mediating purity control to prevent defects without requiring complex integration into the main process equipment
Data Source
AI summary
A system and a method for reusing carbon dioxide are provided. The system includes: a process apparatus configured to discharge exhaust gas containing carbon dioxide therefrom; a purifying device configured to purify the exhaust gas, and thus produce reused carbon dioxide from the exhaust gas and store the produced reused carbon dioxide; a first supply tank configured to receive the reused carbon dioxide from the purifying device; a second supply tank configured to receive the reused carbon dioxide from the first supply tank and provide the reused carbon dioxide to the process apparatus; and a blocking device configured to, based on determining that a purity of the reused carbon dioxide provided from the purifying device to the first supply tank fails to satisfy a predefined reference, block flow of the reused carbon dioxide from the purifying device to the first supply tank.