Carbon-Doped AsSeGeSi Chalcogenide Memory Material for Thermal Stability

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing switching devices in integrated circuits face challenges with high leakage current and limited thermal stability, which affect their endurance and performance in high-temperature environments.

Innovation Solution

A chalcogenide memory material doped with carbon atoms, comprising arsenic, selenium, germanium, and silicon, is used to create a memory device with improved thermal stability and reduced leakage current, maintaining stable electrical characteristics and endurance even at elevated temperatures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional switching devices are used in integrated circuits, then device functionality is achieved, but leakage current increases and thermal stability deteriorates

Engineering Contradiction:
ImproveenduranceVSAvoidleakage current
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent modifies the material composition parameters by doping chalcogenide with carbon atoms and optimizing the ratio of As, Se, Ge, and Si atoms. This changes the electrical and thermal parameters of the switching device, resulting in reduced leakage current and improved thermal stability while maintaining functionality

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses a composite chalcogenide material containing multiple elements (As, Se, Ge, Si) with carbon doping. This composite structure combines the beneficial properties of each element to achieve low leakage current and high thermal stability simultaneously, resolving the contradiction between reliability and harmful leakage current

Inventive Principle:
Principle #40Composite materials

2Temperature

If conventional switching devices operate at elevated temperatures, then device operation continues, but thermal stability decreases and performance degrades

Engineering Contradiction:
Improvethermal stabilityVSAvoidelectrical characteristic stability
Core Design Contradiction:
TemperatureVSReliability

Solution Approach 1:

The patent optimizes the material composition parameters by doping with carbon and adjusting the As, Se, Ge, and Si ratios. This parameter optimization enhances the material's thermal stability, allowing the device to maintain stable electrical characteristics at elevated temperatures up to 500°C

Inventive Principle:
Principle #35Parameter changes

3Reliability

If chalcogenide material is used without carbon doping, then manufacturing simplicity is maintained, but thermal stability and leakage current performance are insufficient

Engineering Contradiction:
Improvethermal stabilityVSAvoidmaterial composition complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies local quality by introducing carbon atoms at specific doping concentrations (5-20 at%) within the chalcogenide structure. This localized modification with controlled carbon content provides enhanced thermal stability and leakage current performance without requiring complete material system redesign, balancing performance improvement with manufacturing feasibility

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The C-doped AsSeGeSi memory material exhibits enhanced thermal stability, maintaining amorphous phase stability up to 500°C and achieving low leakage current and high endurance performance, outperforming undoped counterparts in thermal stability and cycling endurance.

Implementation Method 1

The C-doped AsSeGeSi memory material exhibits enhanced thermal stability, maintaining amorphous phase stability up to 500°C

Methodology Applied
Scientific EffectThermal stability:

Implementation Method 2

achieving low leakage current and high endurance performance

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS11355552B2Memory material, and memory device applying the same
Publication Date: 2022.06.07 MACRONIX INTERNATIONAL CO LTD
  • US11355552B2 patent drawing
  • US11355552B2 patent drawing
  • US11355552B2 patent drawing

AI summary

A memory material and a memory device applying the same are provided. The memory material is a chalcogenide doped with carbon atom. The chalcogenide contains arsenic (As) atom, selenium (Se) atom, germanium (Ge) atom and silicon (Si) atom.