Carbon Nanotube Array Separation via Oxidative Release Layer

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Solution Overview

Problem

Carbon nanotube arrays grown on substrates using CVD methods adhere strongly to the substrate, making it difficult to separate them effectively, which hinders the production of integrated and high-quality carbon nanotube arrays.

Innovation Solution

A method involving a device with a chamber, gas supplying element, and heater is used to grow carbon nanotubes on substrates with through holes, allowing precise gas delivery and controlled oxidation to weaken the bonding force between the nanotubes and the substrate, enabling easy separation of the carbon nanotube array.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If carbon nanotube array is grown on growth substrate by CVD method, then carbon nanotube array can be prepared successfully, but it adheres strongly to the substrate and is difficult to separate

Engineering Contradiction:
Improvecarbon nanotube array preparation successVSAvoidseparation of carbon nanotube array from substrate
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The substrate is divided into multiple independent substrates, each growing a portion of the carbon nanotube array. This segmentation allows for easier handling and separation of individual nanotube sections while maintaining the overall array structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A release layer is introduced between the carbon nanotube array and the growth substrate. This intermediary layer weakens the bonding force, enabling easy separation of the nanotube array from the substrate while maintaining the integrity of both components.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Manufacturing precision

If carbon nanotube array is grown on substrate, then nanotube array can be formed, but it is difficult to obtain integrated carbon nanotube array by peeling

Engineering Contradiction:
Improvecarbon nanotube array formationVSAvoidbonding force between nanotubes and substrate
Core Design Contradiction:
Manufacturing precisionVSStrength

Solution Approach 1:

The release layer serves as a mediator that reduces the bonding strength between the carbon nanotube array and the growth substrate. This allows the nanotube array to be peeled off as an integrated structure without damaging either the nanotubes or the substrate.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The bonding parameters between the nanotube array and substrate are modified by introducing the release layer with specific material properties. This changes the interaction parameters to achieve optimal adhesion during growth followed by easy separation during harvesting.

Inventive Principle:
Principle #35Parameter changes

3Productivity

If carbon nanotube array is separated from growth substrate, then carbon nanotube array can be harvested, but strong bonding force makes separation difficult and causes damage

Engineering Contradiction:
Improvecarbon nanotube array harvestingVSAvoiddamage during separation
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The release layer acts as a protective intermediary during the separation process, preventing direct mechanical stress between the nanotube array and substrate. This intermediary protection eliminates damage that would otherwise occur during harvesting.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The release layer is prepared in advance to provide cushioning protection during the separation process. This pre-positioned protective layer absorbs and distributes mechanical stresses, preventing damage to the carbon nanotube array before separation even begins.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method allows for the efficient growth and separation of carbon nanotube arrays with consistent height and improved quality, reducing production costs and damage during processing.

Implementation Method 1

the carbon nanotubes can be prepared by Chemical Vapor Deposition (CVD)

Methodology Applied
Scientific EffectChemical Vapour Deposition: Chemical Vapour Deposition

Implementation Method 2

heating the composite structure to a first temperature

Methodology Applied
Scientific EffectHeating: Heating

Implementation Method 3

supplying a carbon source gas and a protective gas to the second substrate surface

Methodology Applied
Scientific EffectGas diffusion: Diffusion

Implementation Method 4

supplying an oxygen containing gas to the second substrate surface, wherein the oxygen containing gas passes through the plurality of through holes to contact with and oxidize the carbon nanotube array

Methodology Applied
Scientific EffectOxidation: Oxidation

Data Source

PatentUS10689258B2Method for making carbon nanotube array
Publication Date: 2020.06.23 HON HAI PRECISION INDUSTRY CO LTD
  • US10689258B2 patent drawing
  • US10689258B2 patent drawing
  • US10689258B2 patent drawing

AI summary

A method for making a carbon nanotube array includes providing a substrate having a first substrate surface and a second substrate surface opposite to the first substrate surface. The substrate has a plurality of through holes spaced from each other, and each of the plurality of through holes extends from the first substrate surface to the second substrate surface. A catalyst layer is deposited on the first substrate surface, to form a composite structure. The composite structure is placed in a chamber. The carbon source gas and protective gas are supplied to the chamber, and the composite structure is heated to a first temperature, to grow a carbon nanotube array on the first substrate surface.