Carbon Nanotube Array Separation via Controlled Oxidation

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Solution Overview

Problem

Carbon nanotube arrays grown on substrates via CVD method adhere strongly, making it difficult to separate them without damaging the array, as conventional peeling methods like using knives or tweezers are inefficient due to the strong bonding force.

Innovation Solution

A method involving oxidation of the carbon nanotube array at a controlled temperature and oxygen flow, weakening the bond between the nanotubes and the substrate, allowing for easy separation by mechanical vibration, tilting, or gentle blowing, preserving the integrity of the array.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If carbon nanotube array is grown on growth substrate by CVD method, then the carbon nanotube array adheres strongly to the growth substrate, but it becomes difficult to separate the carbon nanotube array from the growth substrate

Engineering Contradiction:
Improvebonding strength between carbon nanotube array and growth substrateVSAvoidease of separation
Core Design Contradiction:
StrengthVSEase of operation

Solution Approach 1:

The patent applies parameter changes by introducing oxidation treatment to alter the chemical state of the carbon nanotube array. Specifically, the carbon nanotube array is oxidized in an oxygen-containing atmosphere at controlled temperatures (200-400°C) to form carboxyl groups and other oxygen-containing functional groups on the nanotube surfaces. This chemical modification weakens the bonding between the carbon nanotubes and the growth substrate, enabling easy separation while maintaining the structural integrity of the nanotube array.

Inventive Principle:
Principle #35Parameter changes

2Ease of operation

If carbon nanotube array is peeled from growth substrate by knife or tweezers, then separation can be attempted, but it is difficult to obtain an integrated carbon nanotube array due to strong bonding force

Engineering Contradiction:
Improveease of separationVSAvoidintegrity of carbon nanotube array
Core Design Contradiction:
Ease of operationVSManufacturing precision

Solution Approach 1:

The patent applies preliminary action by performing oxidation treatment on the carbon nanotube array before separation. The oxidation process is conducted in advance to weaken the bonding between the nanotubes and substrate, creating favorable conditions for subsequent easy and damage-free separation. This preliminary chemical modification ensures that when separation is performed (by simple mechanical means like tweezers or even water flow), the nanotube array remains intact and integrated without requiring forceful peeling that would cause damage.

Inventive Principle:
Principle #10Preliminary action

3Ease of operation

If oxidation is performed on carbon nanotube array, then the bond between nanotubes and substrate is weakened for easy separation, but excessive oxidation may damage the nanotube structure

Engineering Contradiction:
Improveease of separationVSAvoidstructural integrity of carbon nanotube array
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent carefully controls oxidation parameters including temperature (200-400°C), oxygen flow rate (50-500 sccm), and oxidation time (1-24 hours) to achieve optimal balance. These parameter adjustments ensure sufficient oxidation to weaken substrate bonding for easy separation while preventing excessive oxidation that would compromise the nanotube structure. The controlled oxidation introduces enough oxygen-containing functional groups to reduce adhesion strength without creating structural defects in the nanotubes.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs feedback control through characterization techniques (Raman spectroscopy, XPS, AFM) to monitor the oxidation state and structural integrity of the carbon nanotube array during and after oxidation treatment. By analyzing the D-band to G-band intensity ratio in Raman spectra and oxygen content from XPS, the oxidation process can be optimized to achieve the desired balance between ease of separation and structural preservation, allowing iterative adjustment of oxidation parameters based on measured outcomes.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables successful separation of carbon nanotube arrays from substrates with reduced damage, improving the quality and purity of the nanotubes by weakening the substrate bond without damaging the array, facilitating integration and transfer.

Implementation Method 1

oxidizing the carbon nanotube array to form an oxidized carbon nanotube array

Methodology Applied
Scientific EffectOxidation: Oxidation

Implementation Method 2

oxidizing the carbon nanotube array at a controlled temperature and oxygen flow

Methodology Applied
Scientific EffectThermal oxidation: Photo-oxidation

Data Source

PatentUS10562774B2Method for separating carbon nanotube array from growth substrate
Publication Date: 2020.02.18 HON HAI PRECISION INDUSTRY CO LTD
  • US10562774B2 patent drawing
  • US10562774B2 patent drawing

AI summary

A method for separating a carbon nanotube array grown on a growth substrate from the growth substrate includes providing a carbon nanotube array grown on the growth substrate. The carbon nanotube array includes a plurality of carbon nanotube, each of the plurality of carbon nanotubes includes a top end and a bottom end, and the bottom end is bonded to the growth substrate. The bottom end is oxidized to form an oxidized carbon nanotube array. And then the oxidized carbon nanotube array or the growth substrate is applied to a force.