Carbon Nanotube Density Control via Insulation Layer Thickness
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Solution Overview
Problem
Field emission display devices using carbon nanotubes face challenges in controlling the generation density of carbon nanotubes, leading to low production yield and inability to realize large sizes due to high operation voltage and leakage current issues with traditional silicon or metal tips.
Innovation Solution
A method involving the formation of a catalytic metal layer on a substrate, followed by an insulation layer of silicon nitride, silicon oxi-nitride, or amorphous carbon, and subsequent annealing and plasma enhanced chemical vapor deposition to control the density of carbon nanotubes, which are then used in a field emission display device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If carbon nanotubes are used as electron emission portions to solve high operation voltage and leakage current problems, then reliability is improved, but generation density cannot be controlled leading to low production yield
Solution Approach 1:
The patent applies parameter changes by systematically varying the thickness of the insulation layer (10-150 nm) to control the generation density of carbon nanotubes. By adjusting this physical parameter, the invention achieves both reliable electron emission and controllable production yield, resolving the contradiction between device reliability and manufacturing productivity.
Solution Approach 2:
The insulation layer serves as an intermediary element between the catalytic metal layer and the carbon nanotube growth environment. This intermediate layer mediates the control of carbon nanotube generation density, enabling both reliable device performance and improved production yield through controlled growth conditions.
2Reliability
If carbon nanotubes are used as electron emission portions, then field emission characteristics are improved, but generation density control is difficult leading to large size requirements
Solution Approach 1:
The patent utilizes parameter changes by adjusting the insulation layer thickness to precisely control carbon nanotube generation density. This enables achieving optimal field emission characteristics with controlled nanotube density, allowing compact device designs without sacrificing emission performance.
3Manufacturing precision
If insulation layer thickness is increased to control carbon nanotube density, then generation density control is improved, but formation process complexity increases
Solution Approach 1:
The patent applies parameter changes through a systematic approach where the insulation layer thickness is varied within a specific range (10-150 nm) to control carbon nanotube generation density. This provides precise manufacturing control while maintaining process simplicity, as the same basic deposition process is used with only the thickness parameter being adjusted.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for controlled carbon nanotube density, enhancing the uniformity and production yield of field emission display devices, optimizing field emission characteristics by adjusting the insulation layer thickness, thereby improving device reliability and performance.
Implementation Method 1
performing a plasma enhanced chemical vapor deposition process using at least one kind of hydrocarbon gas
Implementation Method 2
the forming of the carbon nanotubes may include annealing the substrate
Data Source
AI summary
There are provided a method of forming carbon nano tubes, a field emission display device having the carbon nanotubes formed using the method, and a method of manufacturing the field emission display device. The method of forming carbon nanotubes includes forming a catalytic metal layer on a substrate, forming an insulation layer on the catalytic metal layer, and forming carbon nanotubes on the insulation layer.