Carbon Nanotube Manipulator for Deformation-Free Sample Handling
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing methods for manipulating samples in evacuated chambers, such as electrostatic grippers and mechanical grippers, face issues with unreliable handling of insulating materials and potential mechanical deformation, respectively.
Innovation Solution
The method involves using a bundle of carbon nanotubes for attaching and detaching samples, either by contact or through Beam Induced Deposition techniques like EBID, IBID, or LBID, to facilitate removably attaching samples to a manipulator or substrate, reducing the risk of sample loss and deformation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Force
If an electrostatic gripper is used to manipulate samples, then the gripping force is improved, but the reliability of handling insulating materials deteriorates
Solution Approach 1:
The patent replaces the electrostatic field-based gripping system with a mechanical contact-based system using carbon nanotubes. The nanotubes physically penetrate or contact the sample surface to provide mechanical anchoring, eliminating dependence on electrostatic forces that fail with insulating materials. This substitution of the fundamental gripping mechanism resolves the contradiction by providing reliable attachment regardless of material electrical properties.
Solution Approach 2:
The patent changes the physical state and properties of the gripping interface by using carbon nanotubes with specific mechanical properties (high aspect ratio, flexibility, and strength). The nanotubes can deform and conform to sample surfaces, creating effective mechanical interlocking. This parameter change from field-based to structure-based interaction enables reliable handling of insulating materials while maintaining strong gripping force.
2Reliability
If a mechanical gripper is used to manipulate samples, then the gripping reliability is improved, but the risk of mechanical deformation increases
Solution Approach 1:
The patent employs carbon nanotubes as flexible, thin structures that can conform to sample surfaces without applying excessive localized stress. The nanotubes' flexibility allows them to adapt to sample geometry while their distributed contact area reduces point-load deformation. This flexible structure approach provides reliable gripping while minimizing mechanical damage to delicate samples.
Solution Approach 2:
The patent treats the carbon nanotube tips as replaceable, consumable elements on the manipulator. If nanotubes become contaminated or depleted, they can be replaced without affecting the manipulator body. This disposable approach allows optimization of nanotube properties for maximum sample protection while maintaining gripping reliability, as each new set of nanotubes provides fresh, clean contact surfaces.
3Measurement precision
If a mechanical gripper requires precise positioning, then the gripping accuracy is improved, but the manipulation speed deteriorates
Solution Approach 1:
The carbon nanotube tips possess self-aligning and self-adjusting properties that reduce the need for precise manipulator positioning. The flexible nanotubes can autonomously conform to sample surfaces and find optimal contact points through their own mechanical compliance. This self-service capability reduces positioning requirements and accelerates the manipulation process while maintaining gripping accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach provides a reliable and deformation-free method for handling samples, especially suited for semiconductor samples, enabling quick repositioning and versatile use of manipulators and substrates equipped with carbon nanotubes, enhancing the efficiency and precision of sample handling in charged particle apparatuses.
Implementation Method 1
at least one of the steps of attaching the sample is performed solely by bringing the sample into contact with a bundle of carbon nanotubes
Implementation Method 2
the other step of attaching the sample comprises attaching the sample by beam induced deposition from the group of EBID, IBID or LBID
Implementation Method 3
the other step of attaching the sample comprises attaching the sample by beam induced deposition from the group of EBID, IBID or LBID
Implementation Method 4
the other step of attaching the sample comprises attaching the sample by beam induced deposition from the group of EBID, IBID or LBID
Data Source
AI summary
The invention relates to a method of manipulating a sample in an evacuated chamber of a charged particle apparatus, the method performed in said evacuated chamber, the method including: providing a sample on a first substrate; bringing an extremal end of a manipulator in contact with the sample; attaching the sample to said extremal end, the attaching being a removable attaching; lifting the sample attached to the extremal end of the manipulator from the first substrate and transport the sample to a second substrate; attaching the sample to the second substrate; and detaching the sample from the extremal end of the manipulator. At least one of the steps of attaching the sample being performed solely by bringing the sample into contact with a bundle of carbon nanotubes.