Carbon Nanotube Supercapacitors for Microelectronics Integration
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Solution Overview
Problem
Conventional capacitor designs are inadequate for miniaturization and integration into microelectronics due to limitations in volumetric and gravimetric energy density, and are not compatible with microelectronics fabrication processes.
Innovation Solution
The development of electrochemical double-layer capacitors using vertically-aligned carbon nanotubes with functionalization and low-temperature plasma-enhanced chemical vapor deposition, combined with ionic liquid electrolytes, to achieve high gravimetric and volumetric energy densities, and integration within silicon wafers and printed circuit boards.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If conventional capacitor designs are used, then manufacturing and integration are straightforward, but volumetric and gravimetric energy density are insufficient for miniaturization
Solution Approach 1:
The patent changes the fundamental parameters of capacitor construction by using vertically-aligned carbon nanotube arrays grown through chemical vapor deposition, transitioning from conventional planar electrode designs to three-dimensional nanoscale structures. This enables dramatically higher volumetric and gravimetric energy density while maintaining compatibility with semiconductor fabrication processes through controlled parameter optimization of the CVD growth conditions
Solution Approach 2:
The invention transitions from two-dimensional planar capacitor electrodes to three-dimensional vertically-aligned nanotube arrays, utilizing the vertical dimension to maximize surface area and capacitance within a minimal footprint. This dimensional transformation enables simultaneous improvement in energy density and miniaturization for microelectronics integration
2Volume of moving object
If capacitor size is reduced for miniaturization, then integration into microelectronics is improved, but energy storage capacity is reduced
Solution Approach 1:
The patent utilizes the porous, high-surface-area structure of vertically-aligned carbon nanotube arrays to maximize the electrode-electrolyte interface area within a compact volume. The nanoscale porosity and hierarchical structure of the CNT arrays enable exceptional volumetric capacitance, allowing high energy storage capacity to be achieved in dramatically reduced capacitor volumes suitable for microelectronics integration
Solution Approach 2:
The invention employs composite structures combining vertically-aligned carbon nanotubes with ionic liquid electrolytes and functionalization layers to create a multi-component system that maximizes energy storage density. The composite CNT-ionic liquid structure leverages the high surface area of nanotubes and the high ionic conductivity of the electrolyte to achieve superior volumetric and gravimetric energy density in a miniaturized configuration
3Adaptability or versatility
If conventional capacitor structures are used, then manufacturing processes are simple, but compatibility with microelectronics fabrication processes is poor
Solution Approach 1:
The patent develops a universal fabrication approach using chemical vapor deposition that can grow carbon nanotube arrays on various substrates including silicon wafers, printed circuit boards, and flexible materials. This multi-functional fabrication method integrates capacitor formation directly into existing microelectronics manufacturing workflows, enabling simultaneous deposition of electrodes and integration with other microelectronic components through standard semiconductor processing techniques
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the miniaturization of supercapacitors with gravimetric energy densities exceeding 100 Wh/kg and improved integration into microelectronics, addressing the challenges of size reduction and energy storage needs in microelectronics systems.
Implementation Method 1
electrochemical double layer capacitors (ECDL), otherwise known as supercapacitors
Implementation Method 2
ionic liquid electrolytes
Implementation Method 3
Carbon nanotubes have been heavily studied in the development of capacitors. The scale of function of these ECDLs is drastically smaller than conventional capacitors. Furthermore, it has been shown to possess capacitances from 15-200 F/g, depending on the active surface area.
Data Source
Figure 1A~2
Figure 3A~3C
Figure 4A~4B
AI summary
The disclosure provides for electrochemical supercapacitors with high energy densities, based on paired groups of carbon nanotube mounted to conductive substrates. In one variation, the electrochemical supercapacitors are double layer capacitors, or electrochemical double layer capacitors, containing opposing groups of carbon nanotubes on opposing substrates. In another variation, the capacitor is an interdigitated capacitor of alternating electrode containing carbon nanotubes, mounted on a common substrate. Processes and devices are also described.