Carbon Pre-Heat Ring for Uniform Semiconductor Chamber Heating
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Solution Overview
Problem
Existing semiconductor processing chambers face challenges in achieving uniform temperature and deposition across substrates, which can lead to increased chamber footprints, component contamination, reduced component lifespan, and decreased throughput.
Innovation Solution
The implementation of a pre-heat ring with a carbon heater having a carbon content of at least 99% by atomic percentage, coupled with a power source and a controller to manage temperature, enhances temperature uniformity and deposition uniformity in semiconductor manufacturing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If traditional heating systems are used to achieve temperature uniformity, then chamber footprint increases, but manufacturing precision deteriorates due to deposition non-uniformity
Solution Approach 1:
The heating system is segmented into multiple independent linear heating elements arranged in a grid pattern across the substrate surface. Each heating element can be independently controlled to provide localized temperature adjustment, enabling precise temperature uniformity without requiring a large chamber footprint. The segmentation allows targeted heating of specific regions that need temperature correction.
Solution Approach 2:
Different regions of the substrate receive different heating intensities through independently controllable linear heating elements. The system applies local quality by adjusting temperature parameters in specific areas based on measured temperature non-uniformity, rather than applying uniform heating across the entire chamber. This enables precise temperature control without expanding chamber size.
2Manufacturing precision
If substrate rotation is used to improve deposition uniformity, then manufacturing precision improves, but device complexity increases
Solution Approach 1:
The mechanical substrate rotation system is replaced with a stationary substrate approach using electrically controllable linear heating elements. Instead of rotating the substrate to achieve uniform deposition, the system uses electrical control of multiple heating zones to create uniform temperature distribution. This substitution eliminates mechanical complexity while maintaining or improving deposition uniformity through precise thermal control.
3Power
If traditional heaters are used, then heating capability is maintained, but object-generated harmful factors increase due to component contamination
Solution Approach 1:
The heating elements are constructed using composite materials, specifically silicon carbide (SiC) or other ceramic materials, that combine high electrical resistivity for efficient heating with exceptional chemical inertness and resistance to contamination. These composite materials maintain full heating capability while generating no harmful contaminants, eliminating the contamination issues associated with traditional heater materials.
Solution Approach 2:
The heating elements are made from chemically inert ceramic materials that resist reaction with process gases and do not outgas contaminants. This creates an inherently clean heating environment that maintains heating capability while preventing component contamination, effectively creating an inert heating atmosphere without requiring additional purification systems.
4Use of energy by stationary object
If traditional heating components are used, then heating function is provided, but loss of time increases due to reduced component lifespan and increased cleaning
Solution Approach 1:
The linear heating elements are designed as replaceable, cost-effective ceramic components that can be quickly swapped when worn. These inexpensive ceramic heating elements have long operational lifespans due to their resistance to degradation, but when they do fail, they can be rapidly replaced without complex disassembly, minimizing chamber downtime. The simplicity of the heating element design enables quick maintenance cycles.
Solution Approach 2:
The heating system is designed to be self-diagnostics capable, with sensors that monitor temperature uniformity and heating element performance in real-time. The system automatically identifies underperforming heating zones and can adjust operation to compensate, reducing the frequency of maintenance interventions. This self-monitoring and self-adjustment capability minimizes downtime by preventing failures before they occur.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution facilitates improved temperature and deposition uniformity, reduces particle contamination and degradation of chamber components, and increases processing chamber throughput and component lifespan.
Implementation Method 1
a carbon heater coupled to the ring structure. The carbon heater has a carbon content that is at least 99% by atomic percentage
Data Source
AI summary
The present disclosure relates to pre-heat rings including carbon heaters, and related heating systems, methods and processing chambers for semiconductor manufacturing. In one or more embodiments, a pre-heat ring applicable for use in semiconductor manufacturing includes a ring structure, and a carbon heater coupled to the ring structure. The carbon heater has a carbon content that is at least 99% by atomic percentage.