Carbon Thin Line Probe with Internal Metal for Durability

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Solution Overview

Problem

Current carbon thin line probes for scanning probe microscopes lack durability and reliability, and existing methods for imparting magnetic characteristics are complex and not suitable for batch processing.

Innovation Solution

A carbon thin line probe with a high aspect ratio and internal metal content is formed using a high-energy beam irradiation method, where the metal is uniformly or selectively integrated within the carbon nanotube structure, enabling magnetic properties and improved mechanical strength.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If carbon thin line probes are used for scanning probe microscopes, then high aspect ratio and atomic order measurement resolution are achieved, but durability and reliability are insufficient

Engineering Contradiction:
Improvemeasurement resolutionVSAvoiddurability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent creates a composite structure by integrating metal atoms within the carbon nanotube lattice. The metal atoms are incorporated during carbon nanotube formation, creating a hybrid material that combines the high aspect ratio and measurement precision of carbon nanotubes with the durability and reliability of metal reinforcement, resolving the contradiction between measurement precision and reliability

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent alters the internal structure parameter of the carbon nanotube by introducing metal atoms at specific positions within the nanotube lattice. This parameter change strengthens the nanotube structure without compromising its external dimensions or measurement capabilities, thereby improving durability while maintaining measurement resolution

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If metal ultrafine particles are fixed to CNT terminal end, then magnetic characteristics are imparted, but manufacturing complexity increases and batch processing becomes difficult

Engineering Contradiction:
Improvemagnetic characteristicVSAvoidmanufacturing complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent incorporates metal atoms into the carbon nanotube structure during the carbon nanotube formation process itself, rather than adding them afterward. This preliminary action integrates magnetic functionality directly into the manufacturing process, enabling batch production of magnetized probes without requiring separate complex assembly steps

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent merges the carbon nanotube formation process with metal atom incorporation into a single integrated process. By combining these two operations, the patent eliminates the need for separate steps to add magnetic properties, thereby reducing manufacturing complexity while maintaining magnetic functionality

Inventive Principle:
Principle #5Merging (Combining)

3Reliability

If metal is incorporated into carbon nanotube, then durability and magnetic properties are improved, but manufacturing precision requirements increase

Engineering Contradiction:
ImprovedurabilityVSAvoidmetal distribution uniformity
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent applies local quality by selectively placing metal atoms at specific positions within the carbon nanotube structure rather than uniformly distributing them throughout. This localized incorporation method ensures that metal atoms are positioned where they provide maximum structural reinforcement and magnetic functionality, while maintaining control over their distribution to avoid excessive manufacturing precision requirements

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The resulting probe offers high durability, reliability, and the ability to perform high-resolution measurements with magnetic sensitivity, suitable for scanning probe microscopes and micro-injectors, while allowing for cost-effective batch fabrication.

Implementation Method 1

CNT having a high aspect ratio of several nanometers to several- ten nanometers in diameter and several μm to several-ten μm in length can now be formed using thermal decomposition or arc discharge

Methodology Applied
Scientific EffectThermal decomposition: Pyrolysis

Implementation Method 2

CNT having a high aspect ratio of several nanometers to several- ten nanometers in diameter and several μm to several-ten μm in length can now be formed using thermal decomposition or arc discharge

Methodology Applied
Scientific EffectArc discharge: Electric Arc

Implementation Method 3

by causing a flow of C6H6 gas while maintaining a vacuum, a CNT 104 is formed on the lower end of a Ni ultrafine particle 103 by means of dehydro catalytic reaction

Methodology Applied
Scientific EffectChemical Vapour Deposition: Chemical Vapour Deposition

Implementation Method 4

when irradiated by an electron beam, is denatured and becomes a fusion bonding portion so that it is fixed by means of thermal fusion bonding to the probe of cantilever

Methodology Applied
Scientific EffectThermal fusion bonding:

Implementation Method 5

when an electron beam is irradiated onto the vicinity of CNT at the interior of an electron microscope where a carbon compound occurs as impurity, a coating film consisting of a carbon coat is deposited over a proximal end portion of CNT whereby CNT is firmly fixed to the probe through the coating film

Methodology Applied
Scientific EffectCarbon coating deposition: Deposition (physical)

Data Source

PatentUS7543482B2Carbon thin line probe
Publication Date: 2009.06.09 OLYMPUS CORPORATION(JP)
  • US7543482B2 patent drawing
  • US7543482B2 patent drawing
  • US7543482B2 patent drawing

AI summary

A carbon thin line probe having a carbon thin line selectively formed at a projection-like terminal end portion thereof by means of an irradiation of high-energy beam, the carbon thin line internally containing a metal. Thereby achieved is a carbon thin line probe suitable for example for the probe of SPM cantilever, which has a high aspect ratio and high durability and reliability, capability of batch processing based on a simple manufacturing method, and to which magnetic characteristic can be imparted.