Ceramic-Coated Carbon Susceptor for CVD Uniformity

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Solution Overview

Problem

In CVD systems for epitaxial growth, graphite susceptors deteriorate due to reaction with air and hydrogen, leading to particle generation and defects in semiconductor wafers, as the ceramic coating struggles to form uniformly within elongated holes, resulting in oxidation and decomposition of the inner surfaces.

Innovation Solution

A carbon component with a ceramic coating on its outer surface and a groove-formed inner surface, where two carbon plate members are joined together, ensuring the inner surface of the elongated hole is entirely coated, preventing reaction with oxidizing and decomposable gases, and using a method that includes purifying the carbon members, forming grooves, and applying a ceramic coating to the inner and outer surfaces except the mating surfaces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a ceramic coating is applied to protect graphite from reaction with air and hydrogen, then the graphite base material is protected from deterioration, but the ceramic coating fails to uniformly form within elongated holes, causing localized oxidation and decomposition

Engineering Contradiction:

Improveprotection from deteriorationVSAvoiduniformity of ceramic coating

Core Design Contradiction:

ReliabilityVSManufacturing precision

Solution Approach 1:

The susceptor is divided into multiple sections with different hole configurations. elongated holes are segmented into multiple smaller holes or given different orientations, allowing ceramic coating to form uniformly throughout the structure while maintaining protective functionality

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions of the susceptor are given different hole patterns optimized for their specific functions. Gas introduction holes have different configurations than exhaust holes, allowing each region to be optimally coated while maintaining overall protection

Inventive Principle:

Principle #3Local quality

2Adaptability or versatility

If elongated holes are formed in the graphite susceptor for gas introduction and exhaust, then the CVD process functionality is enabled, but the ceramic coating cannot reach deep into the holes, causing particle generation from the hole interior

Engineering Contradiction:

Improvegas flow functionalityVSAvoidparticle generation

Core Design Contradiction:

Adaptability or versatilityVSObject-generated harmful factors

Solution Approach 1:

Elongated holes are divided into multiple smaller holes distributed throughout the susceptor structure. This segmentation allows ceramic coating to reach all surfaces effectively while maintaining gas introduction and exhaust functionality through the distributed hole network

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The hole structure transitions from deep elongated cavities to a distributed network of smaller holes with optimized depth-to-diameter ratios. This dimensional change enables complete ceramic coating coverage while preserving gas flow pathways through the susceptor

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

3Productivity

If the graphite susceptor is exposed to atmosphere at high temperature for wafer exchange, then wafer processing efficiency is maintained, but the graphite reacts with air causing heavy deterioration

Engineering Contradiction:

Improvewafer exchange efficiencyVSAvoidgraphite durability

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

A complete ceramic coating is applied to all surfaces of the graphite susceptor before it enters the CVD chamber and is exposed to high-temperature atmosphere. This preliminary protective action ensures the graphite remains durable during repeated wafer exchanges and atmospheric exposure

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The susceptor becomes a composite structure combining graphite base material with a complete ceramic coating layer. This composite structure maintains the thermal and mechanical properties of graphite while adding oxidation and hydrogen resistance from the ceramic layer, ensuring durability during high-temperature operation

Inventive Principle:

Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The carbon component effectively prevents deterioration and particle generation, ensuring uniform ceramic coating within the elongated hole, reducing defects in wafers and maintaining component integrity in oxidizing and decomposable gas environments.

Implementation Method 1

an inner surface of the hole including a surface of the groove is entirely covered with a ceramic coating

Methodology Applied

Scientific EffectChemical barrier protection:

Implementation Method 2

two carbon plate members joined together

Methodology Applied

Scientific EffectMaterial bonding:

Data Source

PatentUS9156743B2Carbon component and method for manufacturing the same

Publication Date: 2015.10.13 IBIDEN CO LTD

AI summary

A carbon component having a hole therein and an outer surface covered with a ceramic coating, and a method for manufacturing the carbon component are provided. The carbon component includes two carbon plate members joined together. The hole is defined by a groove formed on a mating surface of at least one of the carbon plate members and a mating portion of the other of the carbon plate members, which opposes the groove. An inner surface of the hole including a surface of the groove is entirely covered with a ceramic coating.