Carboxylate Resist Composition for Line Edge Roughness Control
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Solution Overview
Problem
Existing resist compositions using salts as carboxylic acid generators fail to produce resist patterns with satisfactory line edge roughness (LER).
Innovation Solution
A carboxylate represented by formula (I) is used in a resist composition, which includes a carboxylic acid generator, along with an acid-labile resin and another acid generator, to form a resist pattern through a process of application, drying, exposure, heating, and development.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional salts are used as carboxylic acid generators in resist compositions, then the resist composition can be manufactured with existing materials, but the line edge roughness (LER) of the resulting resist pattern is unsatisfactory
Solution Approach 1:
The patent changes the chemical parameters of the carboxylic acid generator by using carboxylates with specific molecular structures (formula I) containing fluorinated alkyl groups and hydrocarbon groups with specific carbon atom ranges. This parameter change in the chemical composition directly improves the line edge roughness while maintaining manufacturability through established resist composition processes.
Solution Approach 2:
The patent employs composite material design by combining carboxylate structures with specific functional groups (fluorinated alkyl groups, hydrocarbon groups) in a defined molecular architecture. This composite structure at the molecular level creates the desired performance characteristics for reduced line edge roughness while allowing flexibility in material selection.
2Manufacturing precision
If a carboxylate with specific molecular structure is used to improve line edge roughness, then the LER is improved, but the complexity of the carboxylate structure increases
Solution Approach 1:
The patent applies local quality by introducing specific functional groups (fluorinated alkyl groups at R1 position, hydrocarbon groups at R2-R4 positions) at particular locations in the carboxylate molecular structure. This localized modification of molecular properties achieves the desired line edge roughness improvement without requiring complete structural redesign of the entire molecule.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The carboxylate-based resist composition achieves improved line edge roughness (LER) in the resulting resist pattern.
Implementation Method 1
a carboxylic acid generator... to form a resist pattern through a process of application, drying, exposure, heating, and development
Implementation Method 2
a resin having an acid-labile group
Data Source
AI summary
Disclosed are a carboxylate represented by formula (I), and a carboxylic acid generator and a resist composition, including the same:wherein R1 represents a fluorine atom or a fluorinated alkyl group having 1 to 4 carbon atoms; R2, R3 and R4 each independently represent a halogen atom, a fluorinated alkyl group having 1 to 4 carbon atoms or a hydrocarbon group having 1 to 12 carbon atoms, and —CH2— included in the hydrocarbon group may be replaced by —O— or —CO—; m2 and m3 represent an integer of 0 to 4, and m4 represents an integer of 0 to 5; and X0 represents a hydrocarbon group having 1 to 72 carbon atoms which may have a substituent, and —CH2— included in the hydrocarbon group may be replaced by —O—, —S—, —CO— or —SO2—.