Carrier Device Cooling Plate for Linkage Arm Thermal Management
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Solution Overview
Problem
Carrier devices with linkage arm mechanisms experience reduced position and trajectory accuracy and potential damage due to thermal expansion and lubrication issues when handling high-temperature substrates, as they are susceptible to radiation heat, leading to increased costs for non-lubricated materials.
Innovation Solution
Incorporating cooling plates between the linkage arms and horizontal movement members, which rotate with the pivot shaft, to mitigate the impact of radiation heat and provide cooling, while also using reflective materials to reduce heat reflection and employing separate cooling plates for upper and lower arms and the pivot shaft.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the linkage arm mechanism is used to carry high-temperature substrates, then the substrate can be transported in the vacuum space, but the upper arm and lower arm are susceptible to radiation heat causing thermal expansion that reduces position accuracy and trajectory accuracy
Solution Approach 1:
A cooling plate is introduced as an intermediary component between the upper arm/lower arm and the substrate. The cooling plate absorbs radiation heat from the substrate and transfers it to the cooling fluid circulating through cooling passages, preventing the heat from directly affecting the linkage arm mechanism and maintaining position accuracy.
Solution Approach 2:
The patent replaces the direct thermal coupling mechanism with a fluid-based thermal management system. Instead of relying on the structural integrity of the linkage arms to withstand heat, a cooling fluid circulation system is used to actively manage thermal loads, substituting mechanical thermal resistance with active thermal convection.
2Reliability
If the linkage arm mechanism is used to carry high-temperature substrates, then the substrate can be transported, but the lubrication oil applied to the linkage arm portions is dried off by radiation heat causing contamination and potential damage
Solution Approach 1:
The cooling plate serves as a thermal barrier and intermediary that protects the linkage arm portions from direct radiation heat exposure. By positioning the cooling plate between the heat source and the lubricated joints, it prevents the radiation heat from reaching and drying out the lubrication oil, thereby maintaining linkage arm reliability.
Solution Approach 2:
The cooling system provides beforehand cushioning by pre-cooling the linkage arm portions and continuously removing heat before it can reach critical levels that would dry out the lubrication oil. This preventive thermal management protects the lubrication system from heat-induced failure.
3Object-affected harmful factors
If cooling plates with reflective materials are added to protect against radiation heat, then the impact of radiation heat is reduced, but the device complexity increases
Solution Approach 1:
The cooling plate is designed to perform multiple functions simultaneously: it serves as a structural support component, a thermal barrier, a heat sink with cooling passages, and a mounting surface for reflective materials. By consolidating these functions into a single component, the patent reduces overall device complexity while maintaining effective radiation heat protection.
Solution Approach 2:
The patent merges the cooling function, structural support function, and radiation reflection function into an integrated cooling plate assembly. The cooling passages are embedded within the plate structure, and the reflective materials are attached to the same component, combining multiple protective mechanisms into a unified system that minimizes additional complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces the impact of radiation heat on the linkage arm mechanism, maintaining accuracy and preventing damage, while minimizing lubrication-related issues and costs by actively cooling the arms and pivot shaft during high-temperature operations.
Implementation Method 1
the radiation heat is conveyed to a peripheral member of the work because the work that is carried by the carrier device is in a high temperature state
Implementation Method 2
cooling plates are respectively provided between the upper arms and the horizontal movement members
Implementation Method 3
reflective materials are stick on surfaces of the cooling plates on the horizontal movement member side
Implementation Method 4
portions of the upper arm and the lower arm are thermally expanded, so that the position accuracy and the trajectory accuracy are reduced
Data Source
AI summary
There is provided a carrier device that has a linkage arm mechanism, in particular, a carrier device that cools the linkage arm mechanism and can reduce the impact of radiation heat from a work that is in a high temperature state. A carrier device is a carrier device that includes a linkage arm mechanism and a pivot shaft, and the linkage arm mechanism includes lower arms and upper arms, and one ends of which are respectively connected to the lower arms, and horizontal movement members that support a work that is connected to the other ends of the upper arms, and cooling plates are respectively arranged between the upper arms, and the horizontal movement members.