Package Structure Carrier Edge Geometry to Prevent Dielectric Sagging
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Solution Overview
Problem
The manufacturing of semiconductor substrates with increased I/O connections faces challenges due to sagging of dielectric layers at the periphery edges, leading to exposure and damage, which reduces yield as the release film is peeled off prematurely.
Innovation Solution
A manufacturing method involving a carrier with a top surface and lateral side surface where an under layer is formed to expose a flat portion, allowing a flowable material to cover and protect the periphery, preventing damage from developers and etchants, and ensuring complete formation of circuit layers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the circuit layers are increased in size to accommodate more I/O connections, then the electrical performance and functions are improved, but the yield of the semiconductor substrate decreases due to sagging and damage at periphery edges
Solution Approach 1:
The patent applies preliminary action by forming an under layer on the carrier before forming the dielectric layer. This under layer is specifically designed to extend to the periphery edges and maintain structural support during subsequent processing steps, preventing the sagging that would otherwise occur with larger circuit layers. The under layer is prepared in advance to address the potential failure mode before it occurs during manufacturing.
Solution Approach 2:
The patent applies local quality by creating a flat portion at the periphery of the carrier where the under layer is formed to a different thickness than the main body. This localized structural modification provides enhanced support and control at the vulnerable periphery edges, while the main circuit layer area maintains its full functionality. The different thickness region specifically addresses the edge sagging problem without affecting the overall circuit performance.
2Object-affected harmful factors
If the dielectric layer is formed to cover the periphery edges, then the protection is improved, but the sagging occurs causing exposure and damage
Solution Approach 1:
The under layer is formed in advance on the carrier before the dielectric layer is applied. This preliminary structure provides a rigid foundation that prevents the dielectric layer from sagging during formation and subsequent processing. The under layer's extension to the periphery edges ensures that the dielectric layer maintains proper shape and coverage without experiencing the sagging that would lead to exposure and damage.
Solution Approach 2:
The under layer acts as an intermediary structure between the carrier and the dielectric layer. It provides mechanical support and structural stability to prevent dielectric layer sagging, while also serving as a foundation for the dielectric layer to be formed upon. This intermediate layer resolves the contradiction by enabling both edge coverage and shape maintenance simultaneously.
3Ease of manufacture
If the release film is removed after circuit layer formation, then the circuit layers are completed, but the release film peels off prematurely causing damage
Solution Approach 1:
The under layer is formed on the carrier as a preliminary structure before the circuit layers are completed. This under layer maintains the release film's attachment to the carrier throughout the manufacturing process, preventing premature peeling. The under layer's structural support ensures that the release film remains stable even as the circuit layers are formed and processed, allowing complete circuit layer formation without early release film failure.
Solution Approach 2:
The under layer provides beforehand cushioning by creating a buffer structure that absorbs and distributes mechanical stresses during manufacturing. This cushioning effect prevents the release film from peeling off prematurely by providing structural reinforcement at the carrier interface, allowing the circuit layers to be fully formed without the release film failing early in the process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enhances the yield of semiconductor substrates by preventing premature peeling of the release film and ensuring adequate protection of the periphery edges, allowing for complete formation of circuit layers without sagging issues.
Implementation Method 1
forming an under layer on the carrier to at least partially expose the flat portion
Implementation Method 2
forming a material in a flowable state on the under layer and covering the flat portion
Data Source
AI summary
A manufacturing method for manufacturing a package structure is provided. The manufacturing method includes: (a) providing a carrier having a top surface and a lateral side surface, wherein the top surface includes a main portion and a flat portion connecting the lateral side surface, and a first included angle between the main portion and the flat portion is less than a second included angle between the main portion and the lateral side surface; (b) forming an under layer on the carrier to at least partially expose the flat portion; and (c) forming a dielectric layer on the under layer and covering the exposed flat portion.


