Carrier-Foil Copper Foil for Semiconductor Wire Bonding

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Solution Overview

Problem

The existing wire bonding process for semiconductor packages using silver-palladium electrodes is complex and costly, with high manufacturing expenses due to the use of silver paste and expensive equipment.

Innovation Solution

A carrier foil-attached ultra-thin copper foil with a Cu-Al bonding strength improvement layer, a release layer, and a diffusion prevention layer, which simplifies the bonding process and reduces costs by enhancing bonding strength and chemical resistance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If silver-palladium electrodes are used for wire bonding, then bonding strength and conductivity are improved, but manufacturing cost and process complexity increase

Engineering Contradiction:
Improvebonding strengthVSAvoidprocess complexity
Core Design Contradiction:
StrengthVSDevice complexity

Solution Approach 1:

The patent replaces expensive silver-palladium electrodes with a cost-effective copper foil structure that achieves comparable bonding performance. The copper-based carrier foil with controlled surface properties provides sufficient bonding strength without requiring precious metals, significantly reducing material costs while simplifying the manufacturing process

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The patent modifies the surface properties of the copper foil through controlled oxidation and surface treatment to achieve optimal bonding characteristics. By adjusting surface roughness, oxidation state, and chemical composition, the copper foil attains bonding strength comparable to silver-palladium while maintaining cost advantages

Inventive Principle:
Principle #35Parameter changes

2Reliability

If silver paste is used for forming bonding pads, then electrical conductivity is improved, but manufacturing cost increases

Engineering Contradiction:
Improveelectrical conductivityVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent changes the material parameter from silver paste to copper-based materials with controlled surface oxidation. The copper carrier foil's surface is treated to provide adequate electrical conductivity and bonding properties, eliminating the need for expensive silver paste while maintaining functional performance

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs a composite structure consisting of copper carrier foil with surface oxidation layers and additional copper plating. This composite approach provides both electrical conductivity and mechanical bonding strength without requiring silver-containing materials

Inventive Principle:
Principle #40Composite materials

3Reliability

If ultrasonic wedge bonding is used for wire bonding, then bonding reliability is improved, but equipment cost and process complexity increase

Engineering Contradiction:
Improvebonding reliabilityVSAvoidequipment cost
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent replaces complex ultrasonic wedge bonding equipment and procedures with a simpler bonding approach that utilizes the inherent properties of the copper carrier foil. The foiled structure enables direct bonding without requiring expensive ultrasonic equipment or complex wedge bonding processes

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The copper carrier foil's surface properties are designed to enable self-bonding characteristics that reduce or eliminate the need for complex external bonding equipment. The surface oxidation and roughness control allow the material to bond effectively through simpler processes

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution improves bonding strength and reduces manufacturing complexity and costs, while maintaining excellent bonding properties with semiconductor chips and substrates.

Implementation Method 1

the release layer includes a first metal (A3) having a peeling property

Methodology Applied
Scientific EffectPeeling:

Implementation Method 2

the Al layer may be formed through electroplating or sputtering

Methodology Applied
Scientific EffectElectroplating: Electroplating

Implementation Method 3

the Al layer may be formed through electroplating or sputtering

Methodology Applied
Scientific EffectSputtering: Sputtering

Data Source

PatentUS11917755B2Carrier-foil-attached ultra-thin copper foil
Publication Date: 2024.02.27 ILJIN MATERIALS CO LTD
  • US11917755B2 patent drawing
  • US11917755B2 patent drawing
  • US11917755B2 patent drawing

AI summary

The carrier-foil-attached ultra-thin copper foil according to one embodiment of the present invention comprises a carrier foil, a release layer, a first ultra-thin copper foil, a Cu—Al bonding strength improvement layer, an Al layer, and a second ultra-thin copper foil, wherein the release layer may comprise a first metal (A3) having peeling properties, and a second metal (B3) and third metal (C3) facilitating the plating of the first metal (A3).