Semiconductor Carrier Handling with Vision-Guided Collision Avoidance

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Solution Overview

Problem

Conventional carrier handling devices in semiconductor manufacturing are unsafe due to lack of protection against falling and collision, have low efficiency due to manual positioning, and are not adaptable to various carrier sizes.

Innovation Solution

A carrier handling device equipped with a fork-shaped mechanical arm, an imaging system for automatic positioning, and a collision avoidance sensor, along with pressure and light sensors for secure holding, enhances safety and adaptability to different carrier sizes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional carrier handling device is used, then the device structure is simple, but the safety is poor due to lack of protection against falling and collision

Engineering Contradiction:

ImprovesafetyVSAvoiddevice structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies beforehand cushioning by incorporating sensors (collision sensors, fall detection sensors) that detect potential hazards before they cause damage. The system proactively identifies collision risks and fall conditions, enabling preventive actions to protect the carrier and its contents before actual harm occurs.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

The patent uses sensors as intermediary elements between the carrier handling device and the environment. These sensors act as mediators that detect external conditions (collisions, falls) and transmit information to the control system, enabling the device to respond appropriately without direct physical contact or damage.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Productivity

If manual positioning is used in carrier handling, then the device complexity is low, but the handling efficiency is low

Engineering Contradiction:

Improvehandling efficiencyVSAvoidpositioning system

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The patent implements self-service through automated positioning systems that independently locate and handle carriers without manual intervention. The system uses imaging devices and sensors to automatically detect carrier positions, calculate optimal handling paths, and execute positioning operations autonomously, eliminating the need for manual positioning while improving efficiency.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The patent replaces manual mechanical positioning with an automated system combining imaging devices, sensors, and control algorithms. This substitution transforms the positioning function from a manual mechanical operation to an automated electro-mechanical system, significantly improving handling efficiency while accepting increased system complexity.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Adaptability or versatility

If a conventional carrier handling device is used, then the device weight is low, but the adaptability to different carrier sizes is poor

Engineering Contradiction:

Improveadaptability to carrier sizesVSAvoiddevice weight

Core Design Contradiction:

Adaptability or versatilityVSWeight of moving object

Solution Approach 1:

The patent applies dynamics by incorporating adjustable and reconfigurable components in the handling device. The mechanical structure can dynamically adapt to different carrier sizes through adjustable grippers, movable components, and flexible positioning mechanisms, allowing the same device to handle multiple carrier dimensions without requiring multiple specialized devices.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The patent implements universality by designing a multi-functional handling device that can accommodate various carrier sizes and types. The system uses programmable control, adjustable mechanical components, and sensor-based detection to universally handle different carriers, replacing the need for multiple specialized devices with a single versatile unit.

Inventive Principle:

Principle #6Universality (Multi-functionality)

4Productivity

If automated positioning systems are added to carrier handling devices, then the handling efficiency improves, but the device complexity increases

Engineering Contradiction:

Improvehandling efficiencyVSAvoidsystem complexity

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The patent applies feedback by incorporating sensors that continuously monitor carrier positions, device states, and environmental conditions. The control system uses this feedback information to automatically adjust positioning operations, optimize handling paths, and maintain accurate carrier placement, creating a closed-loop control system that improves efficiency while managing complexity through intelligent control.

Inventive Principle:

Principle #23Feedback

Data Source

PatentUS20250096030A1Apparatus and methods for handling semiconductor part carriers

Publication Date: 2025.03.20 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

Apparatus and methods for handling semiconductor part carriers are disclosed. In one example, an apparatus for handling semiconductor part carriers is disclosed. The apparatus includes a mechanical arm and an imaging system coupled to the mechanical arm. The mechanical arm is configured for holding a semiconductor part carrier. The imaging system is configured for automatically locating a goal position on a surface onto which the semiconductor part carrier is to be placed.