Carrier-less Optoelectronic Semiconductor Component Production

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Solution Overview

Problem

Conventional optoelectronic semiconductor components often suffer from increased thermal and electrical resistance, as well as deteriorated optical properties due to the presence of a growth substrate or carrier, which complicates their production and performance.

Innovation Solution

A method for producing 'carrier-less' semiconductor chips by arranging semiconductor chips on an auxiliary carrier, which provides mechanical stability, and then separating and detaching the auxiliary carrier, allowing for the removal of any growth substrate or carrier, thereby improving the optical and electrical properties of the semiconductor component.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If a growth substrate or carrier is used to provide mechanical stability during production, then the mechanical stability is improved, but the thermal and electrical resistance increases and optical properties deteriorate

Engineering Contradiction:
Improvemechanical stabilityVSAvoidoptical properties
Core Design Contradiction:
Stability of the object's compositionVSReliability

Solution Approach 1:

The patent applies preliminary action by providing mechanical stability through a carrier during the production process, then removing it after the semiconductor chip is formed. The carrier is used temporarily to ensure mechanical stability during epitaxial growth and processing, but is subsequently removed to eliminate its negative effects on thermal, electrical, and optical properties in the final product.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent applies the extraction principle by completely removing the growth substrate or carrier from the final semiconductor chip structure. The carrier is extracted after serving its purpose during production, resulting in a 'carrier-less' chip that achieves superior thermal, electrical, and optical performance without the carrier's detrimental effects.

Inventive Principle:
Principle #2Taking out (Extraction)

2Stability of the object's composition

If a growth substrate or carrier is present, then mechanical stability is improved, but thermal resistance increases

Engineering Contradiction:
Improvemechanical stabilityVSAvoidthermal resistance
Core Design Contradiction:
Stability of the object's compositionVSTemperature

Solution Approach 1:

The carrier is used temporarily during production to provide mechanical stability, then removed to eliminate thermal resistance. This preliminary use followed by removal allows the chip to achieve low thermal resistance in the final product while maintaining mechanical stability during the critical production phases.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The carrier is completely extracted from the final chip structure to eliminate thermal resistance. The removal of the carrier substrate results in a carrier-less chip with superior thermal management properties, essential for high-power optoelectronic applications.

Inventive Principle:
Principle #2Taking out (Extraction)

3Stability of the object's composition

If a growth substrate or carrier is present, then mechanical stability is improved, but electrical resistance increases

Engineering Contradiction:
Improvemechanical stabilityVSAvoidelectrical properties
Core Design Contradiction:
Stability of the object's compositionVSReliability

Solution Approach 1:

The carrier provides mechanical stability during production, then is removed to eliminate electrical resistance. This approach allows the chip to achieve superior electrical contact properties in the final product while maintaining structural integrity during manufacturing processes.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The carrier is completely removed from the final chip structure to eliminate electrical resistance and improve electrical properties. The resulting carrier-less chip achieves optimal electrical contact with mounting substrates, enhancing overall device performance.

Inventive Principle:
Principle #2Taking out (Extraction)

4Reliability

If the carrier is completely removed to improve optical properties, then the optical properties are improved, but the production complexity increases

Engineering Contradiction:
Improveoptical propertiesVSAvoidproduction complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The carrier is used during production to simplify handling and processing, then removed in a controlled final step to achieve superior optical properties. This preliminary use of the carrier actually simplifies the overall production process by providing mechanical support during critical growth and processing stages.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The carrier is completely extracted to achieve optimal optical properties. The removal process is integrated into the production flow, and while it adds a step, it enables superior optical performance that justifies the additional processing complexity.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the production of semiconductor components with enhanced efficiency and reduced thermal and electrical resistance, leading to improved performance and simplified processing, suitable for high-power applications like automobile headlights.

Implementation Method 1

The carrier has sufficient thickness to be mechanically self-supporting

Methodology Applied
Scientific EffectMechanical support:

Implementation Method 2

the carrier is first thinned by means of a polishing process

Methodology Applied
Scientific EffectPolishing: Abrasion

Implementation Method 3

then completely removed by means of an etching process

Methodology Applied
Scientific EffectEtching:

Implementation Method 4

The auxiliary carrier is separated in particular at imaginary seams between two adjacent semiconductor chips

Methodology Applied
Scientific EffectMechanical separation:

Implementation Method 5

The auxiliary carrier parts are detached from the semiconductor component by mechanical, chemical, or optical methods

Methodology Applied
Scientific EffectMechanical detachment:

Implementation Method 6

The auxiliary carrier parts are detached from the semiconductor component by mechanical, chemical, or optical methods

Methodology Applied
Scientific EffectChemical detachment:

Implementation Method 7

The auxiliary carrier parts are detached from the semiconductor component by mechanical, chemical, or optical methods

Methodology Applied
Scientific EffectOptical detachment:

Data Source

PatentUS20220376133A1Method for Producing an Optoelectronic Semiconductor Component and Optoelectronic Semiconductor Component
Publication Date: 2022.11.24 OSRAM OPTO SEMICON GMBH & CO OHG
  • US20220376133A1 patent drawing
  • US20220376133A1 patent drawing
  • US20220376133A1 patent drawing

AI summary

In an embodiment a method includes arranging a plurality of semiconductor chips on a carrier, arranging an auxiliary carrier on sides of the semiconductor chips facing away from the carrier, removing the carrier, separating the auxiliary carrier between the semiconductor chips to form auxiliary carrier-chip units, each of the auxiliary carrier-chip units has at least one semiconductor chip and an auxiliary carrier part adjoining the semiconductor chip, arranging each of the auxiliary carrier-chip units on a connecting carrier and removing the auxiliary carrier parts from each auxiliary carrier-chip unit.